Vulcanio handles wafers with 6”, 8” and 12”. Unique software and hardware features ensure exceptional deposition uniformity, bath longevity and unbeatable cost of ownership ratio. Process-tailored analyzers and optimized dosage provide comprehensive process control and highest reliability.
- FOUP system suitable (300mm)
- SMIF system suitable (150, 200mm)
- Processes 25 or 50 wafer batches of 6” to 12” wafers
- Operates with high- and low-profile cassettes
- Dry-in -> Dry-out processing
- Complies with: FM 4910, SEMI S2 and S8, SECS, GEM, CE
- Process control via latest software technology: sensor - software interface, suitable to in-house tracking system, extensive process documentation (consumption, media, temperature, cleaning cycles, end of run, log in), individual recipes