Paul-Meisinger-Str. 18
Deuerling,  D-93180

  • Booth: B1141

Precursor and Dopant Gas Delivery Solutions, Monitoring

POSAS GmbH can offer all kind of Ozone Equipment like generators, analysers, calibrators, destruct units or complete Delivery Systems as well as sensor products to Enhance the Overall Equipment Efficiency (OEE) via Advanced Process Control (APC) like the Piezocon concentration sensor for precise precursor delivery, NDIR end-point-detectors for NF3, CO2... cleans, In-Situ Wafer Temperature Measurement. POSAS is also a specialist for In-Line monitoring systems of chemical composition and physical properties of wet processes based on IR or UV Technology. We represent: Applied Precision, AEROQUAL (gas detection), CI-SEMI (Chemical Monitoring, Pyrometer), Teledyne, INUSA (Ozone), LOREX (gas analysers), and we are the VEECO Channel Partner for all Veeco Flow Technology Products in Europe

NEW: we can offer Teledyne API Instruments, VEECO Precursor Delivery Systems and Gas Mixing Systems for epitaxy, ALD, MOCVD and other applications

NEW: we are a partner of TIGER OPTICS, LLC for the semiconductor industry (AMC monitoring and trace gas analysers)



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