nSPEC® is a full automated, optical micro wafer inspection system for defect with imaging processing and AI.
The microscope wafer inspection system is able to constitute and analyze substrate, epi, patterned and diced wafers. nSpec® system has multiple magnifications to fully identify the density and type of defects. Furthermore there is a setting for single image capture or scan. Wafer sizes, type of defects to be identified and scan resolution are the configurations options. nSPEC® use the highest quality optics from the market leaders in microscopy. Lightning and high-resolution camera captures the image and then analyzes it. The software is intuitive and can control all aspect of measurement, e.g. the focus, specimen movement, lightning and objective selection.