Pfeiffer Vacuum GmbH

Berliner Strasse 43
Asslar,  35614

  • Booth: B1221

Visit us at booth B1221 for complete vacuum solutions!

Pfeiffer Vacuum provides advanced vacuum technology, high quality and comprehensive vacuum solutions, as well as first-class service.

As the inventor of the turbopump, we pioneered innovation and progress in the vacuum industry. Thanks to close collaboration with our customers and our continued focus on their needs, we constantly optimize and expand our product line.  

Our product line includes turbopumps, dry pumps, and measurement equipment for the following applications: PVD, CVD, lithography, etch and implant processes as well as for back end applications. For inspection and metrology applications, we offer low vibration vacuum solutions. Additionally, Pfeiffer Vacuum offers leak detectors and solutions for Airborne Contamination Management (AMC).

In 2017, the Group significantly expanded its product portfolio by acquiring Nor-Cal Products. The product range includes flanges, valves, fittings and chambers as well as custom components.

Pfeiffer Vacuum has over 3,200 employees worldwide and more than 20 subsidiaries.  The corporation is listed on the German TecDAX stock index.


  • A4 series multi-stage Roots pumps
    Dry pumps to address harsh semiconductor and coating applications....

    • High energy efficiency due to multi-stage Roots technology, high efficiency motors and limited use of electrical heaters
    • Wide operating temperature range protects the pump against precursor cracking or condensable deposition
    • High mean time between failures and low cost of ownership
    • High particle tolerance increases tool uptime
    • Extended monitoring functionalities for accurate control of pump operating conditions and idle mode capabilities
    • Semi S2-0712 and UL 61010 compliant
  • ATH 1600 – 3204 M turbopumps
    Turbopumps with 5-axis magnetic levitation...

    • Clean vacuum thanks to lubricant-free magnetic bearings
    • Very high gas throughput for all process gases
    • Outstanding long-term stability and reliability
    • High backing pump compatibility
    • High air ingress stability
    • Low lifetime costs due to maintenance-free technology
    • Freely selectable rotation speed in a broad RPM range for optimized process customization
    • Ultra-low noise and vibration
    • Can be installed in any orientation
  • Mobile leak detectors ASM 390 and ASM 392
    Leak detectors adapted to the semiconductor industry for rapid pump down and short response times on large test objects. Fitted with dry backing pump and high vacuum pump, making them ideal tools for leak testing in clean environments. Semi S2 compliant....

  • Mobile leak detectors ASM 390 and ASM 392 - for rapid pump down and short response times on large test objects

    • Fast testing
    • Robust, accurate and reliable
    • Ergonomic and mobile

    The ASM 390 and ASM 392 are leak detection solutions adapted to the semiconductor and display industries as well as to other demanding applications where rapid pump down and high sensitivity is key. Both models are Semi S2 compliant.

    The leak detectors are fitted with a dry frictionless backing pump and a powerful high vacuum pump, making them the ideal tools for leak testing of various components in clean environments.

    Equipped with an additional turbopump, the ASM 392 will speed up the leak detection process to reduce the downtime of the production equipment.

    The ASM 390 and ASM 392 have been developed to provide full confidence in leak testing regardless of operator knowledge. They deliver accurate results in minimal time, making them highly efficient in the field.

    ASM 390 and ASM 392 are uniquely ergonomic with a convenient size and height, a secondary handle in the front, a fully rotatable, removable display, an inlet in the front for easy connection to test ports and maneuverability for access to all testing areas, even in tight spaces.

    Thanks to a wide, clear color touch panel display, an integrated toolbox with modular compartments and storage space for vacuum bellows, leak detection can be very easy.

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