TSI

Aachen, 
Germany
http://www.tsi.com
  • Booth: B1862

As an international leader in measurement technology for over 50 years, TSI Incorporated provides various solutions for semiconductor applications used in national and standards laboratories worldwide. TSI is a recognized leader in high-sensitivity particle counting and offers a range of instruments to improve the fabrication process by monitoring sub-micrometer and nanoparticles.
Semiconductor node scales continue to decrease to single-digit nanometer dimensions. Monitoring sub-micrometer airborne particle contamination is vital to ensure high product yield and reduce waste by eliminating sources of contamination. TSI instruments provide the best measurement and data to help keep the processes in control. This can be done using real-time airborne particle counters to detect particulates that are sources of cleanroom contamination. Immediate corrective action is critical to increasing product yield and reducing cleanroom operational costs.


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