Process Technology

38809 Mentor Avenue
Willoughby,  OH  44094

United States
https://www.processtechnology.com/
  • Booth: B1516


Process Technology provides high-purity thermal solutions!

Process Technology

For over 40 Process Technology has enabled countless businesses to realize their full potential. What matters most is what we bring you next. Process Technology now adds the Dynatronix brand of pulse, DC and reverse pulse power supplies to our high-purity thermal solutions which include a full line of ultra-pure water, chemical & solvent inline heaters.

NEW ChemHeat In-Line Chemical HeaterBest-in-class for heating wet-process chemistries. Supports advancements in ultra-pure cleanliness requirements. 

Lufran DI Water Series & NEW Chemical Series: The Lufran offers exceptional MTBF of ten years. Proven technology for UPDI heating applications and suitable for the most stringent high purity specifications.

TIH Inline Chemical Heater: The TIH Inline Chemical Heater offers the highest temperature heating available, up to 210°C! It is unmatched in semiconductor process fluid heating.

SHB/SHC Inline Chemical Heater: Safely heat process solvents! Compact size for lower wattage applications.

Pro Series Power Supply: Meets the needs of the most challenging semiconductor applications with its fully programmable HTML browser.


 Press Releases

  • ChemHeat In-Line Chemical Heater. Exceptional performance in a small package! Best-in-class for heating wet-process chemistries. Designed to support advancements in ultra-pure cleanliness requirements. This compact heater utilizes fluoropolymer wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass or recirculating flow applications.

    AVAILABLE NOW!

    FEATURES

    Advanced Cleanliness

    • Chemistry contained within PFA tubing to eliminate environmental exposure
    • No wetted o-ring seals eliminate source for contamination Internal ground plane not in the fluid path

    Patented Purged Housing

    • Early notification of a breach in the fluid path prevents process contamination
    • Extends the life of the heater by continually removing chemical permeation


    Compact & Modular

    • Reduces tool design space requirements
    • Facilitates retrofitting of existing tools
    • Simplifies manufacturing complexity

    Low Internal Volume

    • Reduced cost of chemistry
    • Allows for a faster heat-up time in recirculating applications

    Additional Process Benefits

    • Low watt density for lower surface temperatures
    • Precise and stable temperature control


    APPLICATIONS

    • Semiconductor Wet Processes
    • Filtration
    • Sterilization/Cleaning

    FOR MORE INFORMATION

    visit us at Semicon in Booth 1045
    call 1-440-974-1300
    visit processtechnology.com
    or contact your local representative for more information


 Products

  • ChemHeat In-Line Chemical Heater.
    Exceptional performance in a small package! Best-in-class for heating wet-process chemistries....

  • Designed to support advancements in ultra-pure cleanliness requirements. This compact heater utilizes fluoropolymer wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass or recirculating flow applications.

    FEATURES

    Advanced Cleanliness
    • Chemistry contained within PFA tubing to eliminate  environmental exposure
    • No wetted o-ring seals eliminates source for contamination
    • Internal ground plane not in the fluid path
    Patented Purged Housing
    • Early notification of a breach in the fluid path prevents process contamination
    • Extends the life of the heater by continually removing chemical permeation 
    Compact & Modular
    • Reduces tool design space requirements
    • Facilitates retrofitting of existing tools
    • Simplifies manufacturing complexity
    Low Internal Volume
    • Reduced cost of chemistry
    •   Allows for faster heat-up time in recirculating applications
    Additional Process Benefits
    • Low watt density for lower surface temperatures
    • Precise and stable temperature control

    APPLICATIONS

    • Semiconductor Wet Processes
    • Filtration
    • Sterilization/Cleaning

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