TSI

Neukoellner Strasse 4
Aachen,  D-52068

Germany
http://www.tsi.com
  • Booth: B1862

TSI Inc., international leader in measurement technology for over 50 years and recognized leader in high-sensitivity particle counting, offers a range of instruments to improve the fabrication process by monitoring sub-micrometer and nanoparticles, including but not limited to semiconductor applications.

Improve yield and reduce waste with TSI’s new AeroTrak®+ Remote Airborne Particle Counters – the top-choice for uninterrupted, reliable particle counting during semiconductor or electronics manufacturing with minimal maintenance. Covered by an industry-exclusive 5 year laser warranty.

TSI also offers other high-sensitivity particle counting instruments: TSI 0.1 µm airborne particle counters and 10 nm cleanroom condensation particle counter are designed to meet the critical needs of the semiconductor industry. TSI FMS Software with OPC UA Client/Server functionality makes it easy to exchange data to continuously monitor semiconductor manufacturing cleanrooms.

Learn more at tsi.com/semi


 Press Releases

  • TSI introduces a new range of AeroTrak®+ Remote Airborne Particle Counters (APCs) for monitoring manufacturing cleanrooms. TSI is so confident about the performance of the new laser technology inside, that all models are covered by a industry-exclusive standard 5 year laser warranty.  

    AeroTrak+ Remote APCs supply uninterrupted, reliable particle counting data during the cleanroom manufacturing process. Flexible installation options reduce system complexity and cost of ownership with LoRaWAN long range wireless communications and Power over Ethernet (PoE) capabilities. With use, facilities can protect themselves from increased risk and decrease operational costs related to waste, downtime, and redeployment—with minimal maintenance.

    AeroTrak+ Remote APCs are available for use in facilities with or without an external vacuum system. They incorporate second-by-second sampling. The instant an excursion occurs or an adverse trend starts, the end-user is notified to enable proactive steps to minimize product waste. Also included:

    • PoE for all new models
    • Onboard data storage for up to six months
    • Internal maintenance diagnostics
    • Option for LoRaWAN wireless communication
    • Industrial level electrical immunity

    “TSI’s AeroTrak+ Remote Airborne Particle Counters have been designed with the rapidly changing demands of modern clean manufacturing processes in mind. To deliver maximum flexibility and reduce installation complexity for our customers, LoRaWAN long range wireless technology is the logical choice”, states Tim Russell, TSI Controlled Environments Business Director. “Now, installing and relocating remote airborne particle counting systems has never been easier.”

    About TSI Incorporated

    TSI Incorporated serves a global market by investigating, identifying and solving measurement problems. As an industry leader in the design and production of precision instruments, TSI partners with research institutions and customers around the world to set the standard for measurements relating to aerosol science, health and safety, indoor air quality, air flow, fluid dynamics and biohazard detection. With headquarters based in the U.S. and field offices throughout Europe and Asia, TSI has established a worldwide presence in the markets we serve. Every day, our dedicated employees turn research into reality.


 Products

  • TSI AeroTrak®+ Remote Airborne Particle Counters
    TSI AeroTrak®+ Remote Airborne Particle Counters (APCs) offer cleanroom professionals top-notch reliability and no-hassle operation. They are designed to cover a wide range of particle sizes to meet the needs of your manufacturing environment....

  • Reliable Measurement
    Driving Confident Results

    TSI AeroTrak®+ Remote Airborne Particle Counters (APCs) offer cleanroom professionals top-notch reliability and no-hassle operation. They are designed to cover a wide range of particle sizes to meet the needs of your manufacturing environment. Rapid setup and ease of operation make them top-choice for saving time during installation while ensuring reliable measurements over the life of your clean facility. AeroTrak+ Remote APCs are available in two configurations.

    The 7000 Series is a traditional remote APC used with an external vacuum system. For those applications where an external vacuum system is not available or where retrofitting a flexible clean facility is not feasible, the new 6000 Series remote APC with built-in pump is the ideal solution. Both offer critical advantages to increase your yield.

    No more waiting for critical data with reliable second-by-second sampling

    + Minimizes product risk/waste
    + Reduces manufacturing costs
    + Detects adverse trends to enable instant proactive response—before the end of the sample period
    + Instantly alarms upon excursion

    What’s more…
    + Simple installation options with power over Ethernet
    + LoRaWAN wireless option to ease installation and flexible manufacturing
    + Safe data storage if network should fail (250,000 data buffer size)
    + Easy, rapid setup (all models) or relocation (6000 Series models) to save time and money

  • AeroTrak® Cleanroom Condensation Particle Counter
    Extremely low false-count rate provides accurate 10 nm measurements at low particle concentrations to confidently monitor mini-environments and process gases—keeping manufactured products safe from nanoparticle contamination....

  • The TSI AeroTrak® Cleanroom Condensation Particle Counter (CPC) is the only water-based, laminar flow, high flow rate instrument on the market—providing the confidence needed for monitoring critical environments. Using patented technology, the instrument provides 10 nm sensitivity at a 0.1 CFM (2.83 L/min) flow rate. With an ultra-low false count rate, the AeroTrak® Cleanroom CPC is ideally suited for the low particle concentrations found in ISO Class 1 and Class 2 environments keeping manufactured products safe from nanoparticle contamination.

    Unlike other high flow rate water-based CPCs, the TSI AeroTrak® Cleanroom CPC does not use turbulent mixing, minimizing particle losses and increasing count accuracy. Unlike alcohol or other non-water based CPCs, the TSI AeroTrak® Cleanroom CPC does not introduce chemicals into clean environments. The TSI AeroTrak® Cleanroom CPC has the same easy-to-use graphics interface as other TSI AeroTrak® Particle Counters. Multiple particle counting configurations can be conveniently stored and uploaded as needed. The TSI AeroTrak® Cleanroom CPC can be used as a standalone particle counter or run continuously, integrated into a facility monitoring system like the TSI FMS Software. Optionally, the instrument can be interfaced to other systems using the Ethernet interface and Modbus communications.

  • AeroTrak® Portable Particle Counter Model 9110
    Flow Rate 1 CFM (28.3 L/min) ±5% accuracy / Particle Size Range 0.100 to 10.0 µm...

  • The TSI AeroTrak® Portable Particle Counter Model 9110 offers an accurate measurement of particles down to 0.100 μm! This is made possible utilizing a patented HeNe laser technology that is low maintenance with an enhanced signal to noise ratio. The Model 9110 is ideal for performing ISO-14644-1 classifications for Class 1 and Class 2 cleanrooms. This instrument is designed for clean room monitoring, process tool monitoring, and filter test applications.

    The Model 9110 can generate pass/fail reports for ISO 14644-1 via the onboard printer and the supplied TrakPro™ Lite Secure download software. Multiple particle counter configurations can be conveniently stored and uploaded as needed. This product can be used as a standalone particle counter or integrated into a facility monitoring system like TSI’s FMS 5.

    The Model 9110 complies with all the stringent requirements set forth in ISO 21501-4. It is calibrated with NIST traceable PSL spheres using TSI’s world-class Classifier and Condensation Particle Counters.

    APPLICATIONS
    + Particle contamination monitoring
    + Installed filter leak testing
    + Cleanroom certification

  • Facility Monitoring System
    OPC UA Client/Server certified to monitor particle counts and other environmental parameters—makes great business sense in order to reduce waste, improve yield, improve quality and increase profits....

  • TSI FMS is an advanced, reliable, and user-friendly monitoring software suite that features a truly distributed architecture. With best in class features, such as OPC UA Client/Server, distributed databases, and hot standby, TSI FMS Software offers the unparalleled flexibility and reliability for different IT systems and software applications to communicate and exchange data. This data can then be used to continuously monitor a critical manufacturing space.

    The OPC UA Client/Server functionality decreases installation costs by simplifying facility monitoring system design, offering easy and immediate access to real-time and historic data from all sensors connected to FMS. OPC UA Client/Server securely exchanges data between industrial platforms with ease and reliability, enabling transfer of critical facility monitoring system data to centralized enterprise reporting systems such as LIMS and ERP.


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