AP&S International GmbH

Obere Wiesen 9
Donaueschingen,  D-78166

  • Booth: B1716

We are your partner for wet process equipment

AP&S is one of the leading providers of batch- and single wafer wet process solutions for surface treatment of substrates under cleanroom conditions for customers worldwide.

Our product portfolio includes manual, semi-automated and fully automated wet process tools perfectly fitting to the requirements of the semiconductor-, MEMS- and micro-structuring industries as well as the R&D sector. Additional to our cleaning, developing, etching, stripping, plating and lift-off solutions for flat/wafer-based substrates (silicon, gallium arsenide, germanium, sapphire etc.) we deliver peripheral equipment for parts cleaning, chemical media distribution and management. Furthermore, we offer refurbishment programs for used wet process tools like FSI Mercury, Steag and other. Through our smart service network we guarantee fast and sustainable service on a global base. Our innovative IoT solutions contribute to high efficiency of wet processes in our customers' semiconductor fabs. 

The AP&S headquarters is located in Donaueschingen, Germany. The company's subsidiaries are in China, Singapore and Malaysia.


  • Vulcanio
    Vulcanio - specially designed and optimized for UBM (Under Bumping Metallization) of Aluminum or Copper pads (Nickel, Palladium, Immersion Gold)...

  • Vulcanio handles wafers with 6”, 8” and 12”. Unique software and hardware features ensure exceptional deposition uniformity, bath longevity and unbeatable cost of ownership ratio. Process-tailored analyzers and optimized dosage provide comprehensive process control and highest reliability.

    Technical Features:

    • FOUP system suitable (300mm)
    • SMIF system suitable (150, 200mm)
    • Processes 25 or 50 wafer batches of 6” to 12” wafers
    • Operates with high- and low-profile cassettes
    • Dry-in -> Dry-out processing
    • Complies with: FM 4910, SEMI S2 and S8, SECS, GEM, CE
    • Process control via latest software technology: sensor - software interface, suitable to in-house tracking system, extensive process documentation (consumption, media, temperature, cleaning cycles, end of run, log in), individual recipes
  • Demo Center - AP&S in-house laboratory
    Visit our Demo Center at our headquarters in Donaueschingen, Germany. Single wafer and batch process demonstrations are available....

  • After the latest expansion works in 2018/2019 our Demo Center offers you clean room environment according to ISO5. In the AP&S Demo Center we offer you wet process tool demonstrations, process evaluations and in-house trainings for our customers staff.

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