Process Technology

38809 Mentor Avenue
Willoughby,  OH  44094

United States
https://www.processtechnology.com/
  • Booth: B1516


High-purity thermal & power supply solutions!

Process Technology

For over 40 Process Technology has enabled countless businesses to realize their full potential. What matters most is what we bring you next. Process Technology now adds the Dynatronix brand of pulse, DC and reverse pulse power supplies to our high-purity thermal solutions which include a full line of ultra-pure water, chemical & solvent inline heaters.

​call 1-440-974-1300 • visit processtechnology.com • or contact your local representative for more information
Or stop by Booth: B1516 at Semicon Europa to learn more about this great product!


 Press Releases

  • NEW - ChemHeat In-line Chemical Heater

    Exceptional performance in a small package!
    Best-in-class for heating wet-process chemistries. Designed to support advancements in ultra-pure cleanliness requirements. This compact heater utilizes fluoropolymer wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass or recirculating flow applications.

    FEATURES

    Advanced Cleanliness

    • Chemistry contained within PFA tubing to eliminate environmental exposure
    • No wetted o-ring seals eliminates source for contamination
    • Internal ground plane not in the fluid path

    Patented Purged Housing

    • Early notification of a breach in the fluid path prevents process contamination
    • Extends the life of the heater by continually removing chemical permeation

    Compact & Modular

    • Reduces tool design space requirements
    • Facilitates retrofitting of existing tools
    • Simplifies manufacturing complexity

    Low Internal Volume

    • Reduced cost of chemistry
    • Allows for faster heat-up time in recirculating applications

    Additional Process Benefits

    • Low watt density for lower surface temperatures
    • Precise and stable temperature control


    APPLICATIONS

    • Semiconductor Wet Processes
    • Filtration
    • Sterilization/Cleaning

    FOR MORE INFORMATION

    visit us at Semicon Europa in Booth B1 512
    call 1-440-974-1300
    visit processtechnology.com
    or contact your local representative for more information


 Products

  • XC and XC High Flow In-line Exchangers
    Best in Class High Flow Inline Exchanger supports both recirculating and single pass flow applications....

  • NEW 
    from PROCESS TECHNOLOGY!

    XC and XC High Flow In-line Exchangers

    The XC inline heat exchanger is now available with a high-flow option that provides the same heat transfer performance as before but now with a reduced fluid pressure drop. With a PFA tube-side fluid path the XC Series will meet the most stringent cleanliness requirements to support the next generation semiconductor node technologies. This exchanger supports both recirculating and single pass flow applications.

    FEATURES: 

    High-flow Capacity

    • Large diameter tubing improves flow circulation
    • High-flow option further reduces pressure drop
    • Reduces sizing requirements for associated equipment

    Advanced Cleanliness

    • Chemistry fluid path made from high grade PFA, PTFE or PVDF components
    • No wetted o-ring seals eliminates source for contamination
    • Assembled and tested in clean-room environment

    Low Mass Heat Exchanger

    • Enables faster temperature response
    • Allows for precise and stable temperature control

    Compact Design

    • Reduces tool design space requirements
    • Facilitates retrofitting of existing tools
    • Simplifies manufacturing complexity

    call 1-440-974-1300 • visit processtechnology.com • or contact your local representative for more information
    Or stop by Booth: B1516 at Semicon Europa to learn more about this great product!

  • TIH InLine Chemical Heater
    The TIH offers unmatched performance and reliability!...

  • BEST IN CLASS!
    from PROCESS TECHNOLOGY!

    TIH InLine Chemical Heater

    The TIH offers unmatched performance and reliability with the ability to heat a variety of chemicals up to 210°C. This heater is suitable for either single pass or recirculating applications. Delivers best-in-class performance over a wide range of flow and temperature requirements. The TIH is the most durable and long-lasting inline chemical heater available!

    FEATURES: 

    Designed for Performance and Safety

    • High-temperature configuration available to heat
    • chemicals up to 210°C
    • Multiple plumbing layouts available to better facilitate installation into a variety of tool configurations
    • Grounded electric heating elements
    • Redundant temperature sensors for safe operation
    • Optional O-ring free construction minimizes
    • contamination

    Durable Constuction

    • Patented purge design removes chemical permeation
    • to extend service life
    • All fluoropolymer-wetted surfaces withstand virtually
    • any wet chemistries
    • Heavy-wall PTFE chamber and heater sheath for
    • high temperature/pressure applications

    call 1-440-974-1300 • visit processtechnology.com • or contact your local representative for more information 
    Or stop by Booth: B1516 at Semicon Europa to learn more about this great product!

  • SHB/SHC Chemical and Solvent Heater
    The low wattage SHB/SHC delivers superior indirect heating with temperature stability!...

  • SUPERIOR INDIRECT HEATING
    from PROCESS TECHNOLOGY!

    SHB/SHC Chemical and Solvent Heater

    The SHB/SHC, a low wattage inline chemical/solvent heater, delivers superior indirect heating with temperature stability. Using multiple temperature sensors and self-limiting technology, this heater ensures safe operation during low or no-flow conditions.

    FEATURES: 

    Engineered for Safety

    • Optimized to safely heat chemicals and flammable solvents through indirect contact
    • Redundant temperature sensors ensure safe operation
    • PTC (self-limiting) heating technology standard

    Advanced Cleanliness

    • O-ring free and crevice free design eliminates source for contamination
    • SHB series: Electropolished 316SS for solvents
    • SHC series: PTFE & PFA wetted surfaces for acids and solvents

    Designed for performance

    • Allows for precise and stable temperature control
    • Low watt density design for lower surface temperatures

    call 1-440-974-1300 • visit processtechnology.com • or contact your local representative for more information
    Or stop by Booth: B1516 at Semicon Europa to learn more about this great product!

  • Frontier Chemical and Solvent Heater
    Meet the Best-Selling Frontier Heater - Offers outstanding performance over a wide range of flow and temperature requirements....

  • BEST SELLER 
    from PROCESS TECHNOLOGY!

    Frontier Chemical and Solvent Heater


    Frontier is designed for heating chemicals and solvents in hazardous operating environments. Suitable for heating a wide variety of flammable and non-flammable chemistries using electropolished stainless steel wetted materials for improved cleanliness. Offers outstanding performance over a wide range of flow and temperature requirements. Available up to 36kW, the Frontier is the most powerful inline solvent heater available.

    FEATURES: 

    Engineered for Safety

    • Heat source isolated from flammable chemistries
    • Certified to UL823 compliant and ATEX
    • Suitable for Class I, Div II and Zone 2 hazardous environments

    Indirect Heating Design

    • Provides an evenly heated surface and reduces surface temperatures and hot spots
    • Improves chemical longevity and performance for temperature-sensitive chemicals

    Advanced Cleanliness

    • Electropolished 316SS wetted surfaces and no o-rings in the flow path minimizes contamination of the process liquid
    • Crevice-free design reduces risk of contamination
    • Non-cast design maintains quality of electropolished surfaces

    Designed for Performance

    • More available heating power than other inline solvent heaters (up to 36kW)
    • Lower mass for faster response time
    • Minimizes fluid pressure drop even at very high flow rates (>60 LPM)


    ​call 1-440-974-1300 • visit processtechnology.com • or contact your local representative for more information

    Or stop by Booth: B1516 at Semicon Europa to learn more about this great product!

  • Nexus Multi-Loop Chemical/Solvent Heater
    Manage multiple chambers with one heater - The Nexus Multi-Loop!...

  • MULTI-LOOP!
    from PROCESS TECHNOLOGY!

    Nexus Multi-Loop Chemical/Solvent Heater


    Manage multiple chambers with one heater! Building off of the popular SHC product line, the Nexus incorporates the same safe indirect heating technology to heat up to four separate process loops. Using a single heat source, the Nexus improves chamber-temperature matching performance for advanced processing requirements.

    FEATURES: 

    Reduced complexity

    • One set of controls for up to four process chambers
    • Small space requirements

    Designed for performance

    • Allows for precise and stable temperature control forr multiple chambers
    • Low watt density design for lower surface temperatures

    Engineered for Safety

    • Heats chemicals and flammable solvents through indirect contact
    • Patented purged housing for leak detection

    Advanced Cleanliness

    • O-ring free and crevice free design eliminates source for contamination
    • All PFA wetted surfaces for acids and solvents

    ​call 1-440-974-1300 • visit processtechnology.com • or contact your local representative for more information
    Or stop by Booth: B1516 at Semicon Europa to learn more about this great product!

  • Lufran DI Water and Chemical Series Heaters
    Lufran - turnkey heating systems for DI Water and Chemicals you can trust....

  • NEW - Lufran Chemical Series Heater
    Featuring the fusion of two successful products, the Lufran Chemical Series offers the safe heating capabilities of Frontier (inline chemical heater) in a complete turn-key heating system. With stainless steel wetted materials this heater is suitable for either single pass or recirculating applications for heating a variety of chemicals. Offers outstanding performance over a wide range of flow and temperature requirements. A complete high wattage turn-key heating solution.

    FEATURES
    Complete (turn-key) System

    • Only plumbing and main power required
    • Allows for fast and easy installation
    • Space saving design minimizes footprint requirements

    Suitable for Chemical Heating

    • Indirect heating provides an evenly heated surface
    • Low watt density design reduces surface temperatures and hot spots
    • Improves chemical longevity and performance for temperature-sensitive chemicals

    Designed for Performance

    • More available heating power than other inline chemical heaters
    • Lower mass faster response time
    • Minimizes fluid pressure drop even at very high flow rates (>60 LPM)
    • Crevice-free design eliminates dead-zones

    PID Temperature Control

    • Provides precise and stable temperature for improved process consistency and yields
    • Minimizes temperature fluctuations with flow rate changes

    BEST SELLER - Lufran DI Water Series Heater
    Ultra-pure, ultra-reliable high purity water heater! Utilizing PTFE and PVDF wetted surfaces, the Lufran DI Series is the preferred and industry-leading heating solution for highly-critical semiconductor and flat panel display manufacturing processes. Featuring an advanced temperature control system and sizes up to 312kW, this is the ultimate in ultra-pure deionized water heating.

    FEATURES

    Complete (turn-key) System

    • Only plumbing and main power required
    • Allows for fast and easy installation
    • Space saving design minimizes footprint requirements

    DAC™ (Demand Anticipation Control)

    • Temperature Control System
    • Patented temperature/flow algorithm calculates exact heater output requirements for precise temperature control
    • Responds instantly to changes in flow to minimize temperature fluctuations at the outlet
    • Improves process consistency and yields
    • Quick heat-up and recovery times reduce water consumption

    Patented Purged PTFE-Covered Heating Element Design

    • Maintains DI water cleanliness to decrease wafer defect
    • Monitors integrity of element tubing for breach detection
    • Removes permeation to extend element life expectancy
    • Documented “mean time between failures” of nearly 10 YEARS!

    Additional Benefits

    • 99% efficient heating element reduces waste energy consumption
    • No consumable halogen lamps

    ​call 1-440-974-1300 • visit processtechnology.com • or contact your local representative for more information
    Or stop by Booth: B1516 at Semicon Europa to learn more about this great product!


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