Fabmatics GmbH

Zur Steinhöhe 1
Dresden,  D-01109

  • Booth: B1221

Material Handling Automation for Semiconductor Factories

Fabmatics is an experienced specialist for the automation of material flows and handling processes in semiconductor manufacturing plants, semiconductor process equipments and other high-tech production environments. The company has been implementing automation projects with great success for more than 25 years.
Fabmatics is in a unique position to offer its customers comprehensive solutions in the field of material flow automation from a single source. The service portfolio includes a modular product range of hardware and software for the automation of handling, transport and storage processes as well as solutions for product identification and localization. The offer is supplemented by consulting and development services from the company’s own R & D department in order to provide customized solutions with the highest degree of individualization depth and functional reliability.

Fabmatics does business around the world and currently has some 210 employees at its headquarters in Dresden, Germany and its US subsidiary in Sandy, Utah.


  • Autonomous Navigating Mobile Robots
    Our mobile robots combine an established, clean and safe robot system, with an innovative, autonomously navigating vehicle (AGV) for the flexible transportation of materials and handling tasks in semiconductor fabs....

  • Mobile Robot HERO FAB:

    • Omni-directional drive unit no need for turning of vehicle
    • High payload: up to 12 kg
    • Loading reach: up to 200 mm – 1,500 mm height
    • Advanced safety systems to guarantee human, object and environmental safety
    • Suitable for up to ISO 3/2 environments (open cassettes)
    • Versions for SMIF pods, RSPs, FOUPs, transport boxes and open cassettes
    • 24/7 operation: charging on-the-fly during handling

    Please see our HERO FAB 300 Data Sheet

    And for smaller payloads up to 6 kg take a look at our SCOUT:

    Mobile Robot SCOUT

    • Navigates autonomously
    • 3D sensor technology ensures the recognition and bypassing of obstacles
    • For transport goods up to 6 kg, e.g. open wafer cassettes, trays, workpiece carriers
    • Is cleanroom suitable up to ISO class 3 / US FED class1
    • 24/7 operation: charging on-the-fly during handling
    • Short commissioning times at customer site and low adaption effort to changes in the production environment

    Please see our SCOUT ACTIVE Data Sheet

  • FlatStocker for Zero Footprint Storage
    The FlatStocker by Fabmatics is an innovative system to store wafer cassettes, boxes and other material carriers underneath the cleanroom ceiling....

  • Due to the fact that clean room floor space in semiconductor factories is limited and expensive, Fabmatics developed an innovative stocker concept that saves the floor space for process machines by storing the WIP underneath the clean room ceiling. The FlatStocker is installed directly above the process machines or the corridors of interbay and intrabay of the factory.

    The system can be designed for different material carriers, e.g. HA-200 boxes, open cassettes or SMIF pods. The connection to a transport system (e.g. conveyor), combined with vertical lifts to the machine level, enables fast lot access at any time. Equipped with ID technology (e.g. RFID, barcode), the FlatStocker reports the material ID information to the host system (MCS/MES).


    • Freely scalable and also expandable at a later date
    • Flexible positioning of lifts (input/output stations) and conveyor connections
    • Easy disassembly of the safety bottom shields to enable move-in/out of tall machines

    Link to FlatStocker Website

  • RFID Retrofitting
    A seamless, 100 per cent identification of products forms the necessary basis for any intralogistics automation. For this reason, we offer solutions for retrofitting factories with RFID identification systems....

  • One prerequisite for automated identification by means of RFID is attaching RFID tags to the existing wafer carriers. The requirements for technically implementing the fastening are high: accurate processing, ensuring the carriers are cleaned properly, compliance with the cleanroom class, resistance to moisture deposits, and last but not least, efficiency. Fabmatics has developed a solution based on ultrasonic welding technology that meets these requirements and has proven successful in daily operation.

    To retrofit loadports of process tools with RFID antennas, Fabmatics developed some clean and cost effective antenna fixture solutions.

    To complete the RFID retrofit package, Fabmatics provides various read/write devices in the LF and HF range as well as RFID-based logistics products such as RFID trolleys and RFID racks.

    Take a look at our RFID website.

    Brochure RFID Portfolio

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