ProSys, The Megasonic Technology Leader
When it comes to Megasonics, one name stands out among all others. ProSys. A name synonymous with Megasonics.
With an IP portfolio including 28 Patents (5 more pending), ProSys has driven the advancement of Megasonic Process technology.
We have set the industry standard in Single Substrate processing with our MegPie transducer family, featuring Patented Radial Uniformity and "on the fly" process control.
Our Direct Meg Batch Transducer has taken Batch Processing to new levels of sonic uniformity and reliability by eliminating Glue, Switching Schemes and Cooling Water. Our Direct Batch Arrays are available in a wide range of sizes and materials, suitable for any Wet Process Station.