RECIF Technologies S.A.S

9 Rue des Briquetiers
Blagnac,  F-31703

  • Booth: B1419

RECIF Technologies, the automation partner

RECIF Technologies, a world class equipment supplier of leading edge wafer handling solutions, remains the premier innovator and benchmark in wafer sorting. RECIF's latest development of the COMPACT G5+ (sorters) and SMART platforms (sorters & EFEMs) are typical examples of newer products in a long line of successful tool models. With its 30+ years of experience, RECIF is acknowledged as a world leader in high added value robotics and handling solutions for the Semiconductor Industry.

RECIF supports wafer manufacturing at the most advanced nodes, from standard Si 300mm wafers to advanced packaging substrates (for 3D IC, FO-WLP). RECIF’s commitment is to support customers with high quality, innovative equipment designed to answer their productivity requirements as well as providing continuous improvement to their manufacturing process. RECIF’s COMPACT G5+ and SMART platform’s, meet the highest industry standards and customers’ expectations related to safety and Total Cost of Ownership.

The SMART EFEM's introduction enables RECIF to expand its offer and to enter the OEM market.


  • COMPACT Sorter G5+
    The G5+, latest generation of COMPACT sorters from RECIF Technologies, is the standard solution for 300mm silicon wafers sorting ...

  • The COMPACT G5+ offers fast throughput due to the alignment/OCR function being
    embedded in the handling robot. RECIF's proprietary ACT (Advanced Contact Technology)
    and end effector design features ensure highly secure wafer handling and unsurpassed
    Its industry leading robustness, flexibility and ease of maintainability, coupled with the smallest
    footprint and highest throughtput in a single robot sorter, provides IC manufacturers the
    ultimate productivity solution for 10 nm nodes and beyond.

    Main features :

        Edge contact end effector or Vacuum free backside contact
        N2 purge capability on load ports
        On the fly wafer alignment
        Industrial controller
        Real time field bus and electronics
        Several options like single wafer flipper or single wafer buffer
        2LP & 4LP in line can be integrated into stocker
        Easy recipe creator software

    Further information available upon request

  • SMART EFEM and Sorter
    The SMART range of products is the result of the SMART platform concept, developed by RECIF Technologies to support emerging applications. It addresses the challenges raised by new applications such as 3D IC and advanced packaging....

  • Adopting a modular approach, a common robotics core is interfaced with several loading stages and end effectors. The SMART products are available in Sorters and EFEMs.

    •     300mm advanced substrates EFEM / Sorter
    •     For standard 300mm silicon wafers, 3D IC & FO-WLP
    •     380mm frame EFEM / Sorter
    •     For 300mm wafers mounted on 380mm frames

        Further information available upon request

  • Vacuum Handling System (VHS)
    RECIF manufactures a complete range of Vacuum Handling Systems. The design is made of organic materials, patented vacuum tip design......

  • RECIF Technologies history started in 1982 offering its first wafer handling solution: Vacuum Handling Systems.

    Based on this historical technical mastery, RECIF Technologies provides a full range of single wafer manual vacuum handling solutions adapted to specific customers’ needs.

    Our Vacuum Handling Systems (VHS) range offers:

    • Patented vacuum tip design
    • Clean organic material use
    • A true ESD protection
    • The highest level of cleanliness and safety
    • Manual single wafer handling from 100mm to 300mm

    All parts of our Vacuum Handling System are interchangeable. They can be configured or upgraded to meet specific end-user requirements.

    •  Angled versions of tips available (10°, 30°)
    •  Optional ergonomic upgraded wand
    •  Straight or coiled tubes

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