E+H Metrology GmbH

Benzstr. 5-9
Karlsruhe,  D-76185

Germany
http://www.eh-metrology.com
  • Booth: B1750

Measurement tools for the Semiconductor Industry

E+H offers for more than 40 years now, a wide variety of measurement tools for the Semiconductor and PV in process control and laboratory characterization.
Contactless metrology tools for 1" up to 450mm Wafers consisting out of Silicon, Quartz, Sapphire etc, but also solutions for other materials such as plastic displays are available.
Most metrology tools can be integrated into our own full automated wafer handling solutions (belt driven, robot).

  • Long term customer's care and product support for more than 50 years now
  • Local distributors support your international branch offices with product advises and experienced local engineers
  • Mature, robust & reliable high precision products
  • Products require only low maintenance
  • High throughput for production monitoring and controlling
  • Tracability of results to international calibration standards
  • Flexible product customization near market needs and your requirements
  • Best achievable cost benefit ratio through low product costs and extreme long lifetime
  • Installed base of more than 2000 Semiconductor tools worldwide with references at nearly all major companies around the world


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