One prerequisite for automated identification by means of RFID is attaching RFID tags to the existing wafer carriers. The requirements for technically implementing the fastening are high: accurate processing, ensuring the carriers are cleaned properly, compliance with the cleanroom class, resistance to moisture deposits, and last but not least, efficiency. Fabmatics has developed a solution based on ultrasonic welding technology that meets these requirements and has proven successful in daily operation.
To retrofit loadports of process tools with RFID antennas, Fabmatics developed some clean and cost effective antenna fixture solutions.
To complete the RFID retrofit package, Fabmatics provides various read/write devices in the LF and HF range as well as RFID-based logistics products such as RFID trolleys and RFID racks.
Take a look at our RFID website.
Brochure RFID Portfolio