Continuous monitoring of all process parameters guarantees maximum
supply reliability. The cylinder connection via 3-way-purge-blocks and
an implemented purge program allow highest degree of safety for the
operator – with lowest purge gas consumption at the same time. Safety
features to protect against leaks, overpressure and fire hazard guarantee
maximum safety for personnel and infrastructure. By being made in
Germany and using high-quality components, our gas cabinet achieves
the highest quality standards.
Technical Data
| Material |
316L Stainless steel |
| Surface roughness |
≤ 0.25 Ra μm Ave. |
Helium leak test
Leak rate (inside) |
< 1 x 10-9 scc/s |
| Particle test |
≤ 0.1 μm size: 5 ptc/ft3
> 0.3 μm size: 0 ptc/ft3 |
| Moisture |
< 10 ppb |
| Oxygen |
< 10 ppb |
| Dimensions |
W 800 x D 591x H 2280 (mm) |
Characteristics
• 4VCR®-connection / Orbital welded
• 4Operation via touchpanel Siemens TP900
• 4Exhaust monitoring
• 4Pre- and fine filter
• 4Clean room assembled (ISO 6)
• 4Service ports for maintenance and tests
Tests and qualification
The following tests were done on the whole system
• 4Pressure test
• 4Helium leak test
• 4Particle test (optional)
• 4Moisture test (optional)
• 4Oxygen test (optional)
Standards
• 4CE conformity
• 4TRGS
• 4EIGA
• 4ATEX 2014/34/EU (optional)
• 4SEMI-Standards (optional)
Optional components
• 4Vacuum generator
• 4Height adjustable cylinder mounting
• 4Cleaning cartridge
• 4Rupture disk
• 4Cylinder scales for liquified gases
• 4Flame detection
• 4Gas detection
• 4Cylinder-, panel- and processline heating