INFICON GmbH

Bonner Strasse 498
Cologne,  50968

Germany
http://www.inficon.com/de/indext.html
  • Booth: B1221

INFICON provides world-class instruments for gas analysis, measurement and control. INFICON is a leading developer manufacturer and supplier of vacuum instrumentation, critical sensor technologies and process control software with an emphasis on process engineering expertise, for the semiconductor and related industries. These analysis measurement and control products are vital to original equipment manufacturers (OEMs) and end -users in the complex manufacturing of semiconductors.


 Products

  • UL3000 Fab - Helium Leak Detector
    The INFICON helium leak detector UL3000 Fab (PLUS) is designed for the needs of leak testing in semiconductor applications. It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability. ...

  • FAST RESULTS
    The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs. The HYDRO-S software in the UL3000 Fab PLUS eliminates the water vapour background and makes leak testing even faster. 

    The UL3000 Fab PLUS offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length.

    ROTATABLE AND REMOTE CONTROLLABLE DISPLAY
    The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (PLUS) is possible via smartphone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

    SLIM DESIGN FOR ADVANCED MANEUVERABILITY
    A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (PLUS) even in tight spaces.

  • Factory Performance Systems
    INFICON provides the most comprehensive Industrial Engineering Software Suite for the semiconductor manufacturing industry....

  • INFICON provides the most comprehensive Industrial Engineering Software Suite for the semiconductor manufacturing industry. Our solutions increase capital productivity, labor efficiency and overall fab efficiency by presenting critical information, automating complex decision making, and delivering industry-leading execution capability - all in near real-time, and all from the convenience of any web browser, phone or tablet.

    More information under: https://products.inficon.com/en-us/nav-products/category/productgroup/manufacturing-software/

  • FabGuard Process Control Systems
    FabGuard meets the challenges of today’s semiconductor manufacturing by combining the collective experience of statisticians and engineers tasked with maintaining cutting edge fab productivity....

  • FabGuard meets the challenges of today’s semiconductor manufacturing by combining the collective experience of statisticians and engineers tasked with maintaining cutting edge fab productivity.

    More information under: https://products.inficon.com/en-us/nav-products/category/productgroup/manufacturing-software/

  • Transpector® CPM 3 Compact Process Monitor
    INFICON Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics....

  • FAST, FIELD-READY PROCESS MONITORING SYSTEM

    Performance, Reliability, and Versatility

    INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.

    Transpector CPM 3 provides proven return on investment to our partners through:

    • Industry Leading Measurement Technology
    • Robust and Adaptive Architecture
    • Ease of Maintenance
    • Superior Product Support
  • Transpector® MPH Residual Gas Analyzer
    The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime....

  • UNLOCK YOUR PROCESS

    Unparalleled Performance for Increased Yields and Maximum Uptime

    The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market.

    INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the reliability you have come to expect from INFICON Transpector Gas Analyzers.

    Features

    • Max. Data Rate of 1.8 ms per point for Analog Scans and Selected Peaks
    • TCP/IP Ethernet connectivity
    • Dual filaments
    • Field replaceable Electron Multiplier
    • Combined anode, cathode and repeller filament kit
    • Shorter sensors minimize installed footprint
    • Nine-decade dynamic range
    • MDPP of <2E-15 Torr (100 amu)
    • Increased Signal-to-Noise ratio
    • Interchangeable sensors and electronics
    • Sensors are assembled, tested and double bagged in a cleanroom environment
    • RoHS Compliant

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