MueTec GmbH

  • Booth: B1269

MueTec offers a comprehensive range of optical inspection systems for the semiconductor and MEMS industry, including:

  • Infrared (IR) inspection and metrology for MEMS and wafer
  • Macro Defect Inspection with highest throughput enabling 100% lithography control, wafer backside or blank inspection
  • AOI (Automated Optical Inspection) tools with different automation levels
  • Flexible combination of CD and Overlay metrology with film thickness measurement and defect inspection¬†¬† and review in one tool

We are fast and flexible to tailor our solutions to your individual needs. In more than 25 years, MueTec has installed hundreds of systems around the world that provide proof of highest performance and quality standards.

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