Ozone Equipment, Precursor and Dopant Delivery Solutions
POSAS GmbH can offer all kind of Ozone Equipment like generators, analysers, calibrators, destruct units or complete Delivery Systems as well as sensor products to Enhance the Overall Equipment Efficiency (OEE) via Advanced Process Control (APC) like the Piezocon concentration sensor for precise precursor delivery, NDIR end-point-detectors for NF3, CO2... cleans, In-Situ Wafer Temperature Measurement. POSAS is also a specialist for In-Line monitoring systems of chemical composition and physical properties of wet processes based on IR or UV Technology. We represent: Applied Precision, AEROQUAL (gas detection), CI-SEMI (Chemical Monitoring, Pyrometer), Teledyne, INUSA (Ozone), LOREX (gas analyser), and we are the VEECO Channel Partner for all Veeco Flow Technologies Products in Europe
NEW: we can offer Teledyne Instruments, Precursor Delivery Systems and Gas Mixing Systems
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