Amcoss GmbH

Leusbundtweg 49a
Feldkirch,  6800

  • Booth: C1337

Wafer processing; heat exchanger/chiller; engineering/repair

amcoss GmbH is a high-tech company. We design and build modular, customized fully automatic and semi-automatic wafer spin processors for coating, developing, lift-off, cleaning, tempering, vapor priming of wafers and other substrates with light-sensitive photo resists and other, also high viscosity substances. Our machines are controlled by our intelligent ams pilot software and configured for standard as well as complex, specialized applications.

We also offer plug-and-play heat exchangers and chillers which replace different OEM temperature control units and which are configured for the use with Neslab, AMAT, LAM and other OEM equipment. In the field of optics & mechatronics amcoss designs, manufactures and repairs hiqh-quality optics & components for photolithography, RTP, CVD, EPI, coating, metrology and plasma.

amcoss´s headquarters is located in Austria, from where the company sells its products and services all over the world. There you will also find the R&D department with its laboratory equipped with very special, high-precision measuring devices and our shop floor for the assembly of machines with our smart lab attached. amcoss is on a worldwide scale cooperating with strong, specialized partners.


  • amc fully automatic single-wafer processing tools
    Fully automatic single-wafer processing equipment for coating, developing, cleaning, heating/cooling, and lift-off of wafers with individual configurations according to the customers´ requirements regarding throughput and desired processing options....

  • Customer-specific processes fit for future

    All 3 amcoss amc models have been designed as adaptable platforms for individual configurations and process solutions. The footprints, however, are very compact and room saving. With, e.g. amc 1000+ you will find 3 processes, 1 wafer-handling-station and up to 4 I/O stations on about 1 m² and you may flexibly process wafer sizes between 2“ and 8“.

    Every amcoss amc tool may be optimized either for flexible single processes or high throughput. Choosing the appropriate production equipment results in increased efficiency in various respects which is a highly influential aspect of sustainability.

    Process, cost, and machine efficiency support sustainability

    Almost all features of the amc tools, e.g. linear motor drive for nozzle positioning or our special EBR solutions, as well as the ams pilot software have been configured to optimize process efficiency. So, throughput, as well as quality of the finished product increase, reject diminishes, downtime and prevention costs go down and time is being saved.

    Furthermore, attractive purchasing costs, a very good ROI, low maintenance and spare parts costs, longevity of all components, and the great variety of processable substrates contribute to raising cost and machine efficiency. The compact footprints, as well as the option of a genuine through-the-wall installation save expensive cleanroom capacity.

    Environmental-friendly and safe

    Environmental protection is getting increasingly important and is also a heartfelt matter for amcoss, reflecting in the equipment. Thanks to the energy save mode, the unique amcoss dispense system, an option for media re-use, and the recycling of dissolved metals in the lift-off process, as well as other clever features, not only resists and media, but also energy can be saved resulting in less reject and waste.

    Sustainability has also to focus on humans. Production equipment must be simple, comfortable, user-friendly and safe in operation. Our singular amc operation concept shows in all aspects of our equipment.

  • amcoss amr semi-automatic single wafer processing
    The modular, semi-automatic amcoss amr stand-alone spinner is the perfect tool for highly flexible coating, developing, cleaning, lift-off, vapor priming and heating of single substrates of diameters between 2“ and 300mm within small-lot production....

  • Free choice for profitable small batch series

    The amcoss amr is a completely modular system and perfectly adapted to the requirements of single- and small batch series production. The control unit, consisting of the control system with the ams pilot software, may be flexibly combined according to customer needs and specific process requirements, with one or more selected processing units. Every unit holds one processing module (coater, developer, cleaner, lift-off, hot-/coolplate, vapor priming hotplate or media module). Therefore, our customers can individually compose their personal amr equipment. Depending on the wafer diameters that will have to be processed, the units will be fitted with different processing modules of varying sizes. Consequently, there are two amr types varying in size with, however, the same dimensions:

    amr 200 – for wafer types 2“ to 200 mm in diameter, as well as Small Pieces
    amr 300 – for wafer types 2“ to 300 mm in diameter, as well as Small Pieces

    Proven quality requiring minimum space

    Naturally, all amr units contain the same proven processing modules as used in the amcoss amc equipment with all their sophisticated features. The only difference is wafer handling, which in contrast to the amc series does not run automatically in the amr tools. This means that the operator has to put/remove the substrates manually into/from the process modules. Processes themselves, however, will run fully automatic as usual and will be controlled and monitored by our intelligent ams pilot software. Existing recipes may be taken from/to amcoss amc equipment.

    All processing units do have the same compact and space-saving measurements (except for the control unit, which is even smaller). So, the room required can be planned easily which saves expensive production or laboratory space.

    Sustainable production and company management are not only limited to large-scale production businesses – on the contrary: many times, companies processing small lots very often are facing individual and complex requirements in their production and do have to operate economically sustainable. These needs are fulfilled by the amcoss amr series, so that in terms of costs, technical possibilities, and room consumption you don´t have to crack a nut with a sledgehammer. Of course, you will receive the same proven quality, intelligent technologies, as well as environmentally protective and ergonomic aspects with your equipment.

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