Why are all turbopumps called turbopumps?
Because the multitalented pacesetters were invented by Pfeiffer Vacuum over 50 years ago under this very name: a definitive milestone in vacuum technology! Our turbopumps represent the latest generation of future-orientated vacuum solutions for a wide spectrum of uses. This spectrum includes not only analytics, vacuum process and semiconductor technology but also coating, research and development as well as industrial applications.
The turbopump family includes a wide product spectrum in the pumping speed range of 10 to 2,800 l/s. The pumps provide high cost-efficiency and flexibility. Well-proven bearing systems offer optimized reliability. Thanks to the proven rotor design, extremely high values are achieved where pumping speeds, backing pump compatibility and gas throughput, as well as compression for light gases, are concerned.
Series HiPace® 10 – 800:
Compact, ball or hybrid bearing turbopumps in the pumping speed class from 10 to 800 l/s. Robust design. Minimal space needs. High reliability.
HiPace® 1200 – 2300:
Compact, hybrid bearing turbopumps in the pumping speed class from 1,000 to 2,000 l/s. High pumping speed. High gas throughput. Short run-up time.
HiPace® 300 – 800 M, ATH 500 M:
Compact, magnetically levitated turbopumps in the pumping speed class from 300 to 800 l/s. High gas throughput. Low vibration operation. Low energy consumption.
ATH 1600 – 3200 M:
Compact, magnetically levitated turbopumps in the pumping speed class from 1,400 to 2,800 l/s. High backing pump compatibility. Very high gas throughput. Outstanding longterm stability.