Neukoellner Strasse 4
Aachen,  D-52068

  • Booth: C1854

TSI Inc., international leader in measurement technology for over 50 years and recognized leader in high-sensitivity particle counting, offers a range of instruments to improve the fabrication process by monitoring sub-micrometer and nanoparticles, including but not limited to semiconductor applications.

Improve yield and reduce waste with TSI’s new AeroTrak®+ Remote Airborne Particle Counters – the top-choice for uninterrupted, reliable particle counting during semiconductor or electronics manufacturing with minimal maintenance. Covered by an industry-exclusive 5 year laser warranty.

TSI also offers other high-sensitivity particle counting instruments: TSI 0.1 µm airborne particle counters and 10 nm cleanroom condensation particle counter are designed to meet the critical needs of the semiconductor industry. TSI FMS Software with OPC UA Client/Server functionality makes it easy to exchange data to continuously monitor semiconductor manufacturing cleanrooms.

Learn more at tsi.com/semi

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