The Vistec SB3050 series - with a Cell Projection option - is our commitment to semiconductor manufacturing professionals. Designed to meet the challenges of direct patterning down to the 32nm technology node, it features Variable Shape Beam (VSB) technology with vector scan and continuously moving stage principles for throughput optimization.
- 50KeV high-resolution electron optics
- 310x310mm stage travel
- write-on-the-fly principle & Flexible Stage Speed (FSS)
- fully automated substrate handling
- Wafer mix & match