ESL Elektronik GmbH

Lehnerstrasse 2
Grasbrunn,  D-85630

  • Booth: C1741

ESL Elektronik GmbH-Service is solution - we support you

Refurbishments, Mass Flow Technology, Assembly repairs, Training

ESL is official partner from MATTSON Technology to supply and support refurbished RTP2800/RTP2900 tools to customer specification with high level support, installation and warranty and also provides refurbished LAM systems up to TCP™ systems. Repair center for many assemblies of LAM and MATTSON tools with short repair times and high quality. Training is offered on own Rainbow ™-TCP™-AutoEtch™ and MATTSON™ RTP systems installed in our cleanroom.

ESL does repairs and complete refurbishments of assemblies and parts of LAM©, MATTSON©, GaSonics© and Applied Materials© systems. Thanks to our ISO9001-2015 certified quality management system, we are able to always guarantee the highest quality of our repairs.

ESL supports MFC / MFM made by SEVENSTAR, UNIT, TYLAN, AERA, … We supply digital and analogue MFC / MFM with elastomer and metal seals, 2 sccm to 300 slm. Hi-Temp-, Devicenet-, Profibus-, PI-Technology models with very good price-performance are available. Our Independent Calibration and Repair Centre (cleanroom) handles MFC / MFM various manufacturers up to 200 slm flow traceable to NIST.


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