KLA

1 Technology Drive
MIlpitas,  CA  95035

United States
http://www.kla-tencor.com
  • Booth: C1218

KLA-Tencor’s comprehensive portfolio of SensArray® products (booth C1218) enables in situ monitoring of process tools’ environments. With wired and wireless sensor wafers and reticles, an automation package and data analysis systems, SensArray® products provide comprehensive information for a wide range of wafer and reticle processes. Wafer process equipment manufacturers, IC manufacturers and reticle manufacturers use SensArray® data to visualize, diagnose and control process conditions.


Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".