ATV Technologie GmbH

Johann-Sebastian-Bach-Strasse 38
Vaterstetten,  D-85591

Germany
http://www.atv-tech.com
  • Booth: C1848


SUPERIOR TECHNOLOGY FOR SINTERING,SOLDERING,DIFFUSION &CVD

Founded in 1982 ATV Technologie GmbH is an international player in the field of micro electronics focussing on manufacturing and distribution of vacuum soldering devices and processing ovens. 

SRO i-LINE: Vacuum Reflow Soldering, fully automatic, high volume, void free-IGBT-CSP-DBC,Flip Chip

SRO-GETTER MEMS/PACKAGE SEALING WITH GETTER ACTIVATION

SRO-TCB THERMO COMPRESSION BONDER:300°C,Transient Liquid Phase Soldering/Bonding, warped/thinned chip Ag sintering,Cu pillar/micro bump flip chip soldering

PEO-601/-604 QUARTZ TUBE FURNACE: Fast ramping, multipurpose,ultra-uniform,LPCVD,CNT/graphene,VCSEL/AlGaAs/Si oxidation,diffusion,high vacuum,H2,annealing,alloying,LTCC sintering,thick film paste firing,Polyimide backing,Poly Si,Epitaxy,Si3N4,LTO,P & N solid source diffusion

PHP-630 LTCC SINTERING PRESS:1100°C:Constrained LTCC sintering,hot LTCC/glass embossing

DIAMOND SCRIBERS: to 200 mm Si Wafers,Al2O3, glass,InPh, GaAs


 Products

  • PEO-604 MULTIPURPOSE FAST RAMPING FURNACE
    The PEO series is ideal tool for R&D purposes, pilot line and mass production....

  • Since 1982 ATV is manufacturing the multipurpose fast ramping furnaces PEOs series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment. It can be applied easily for new unique and sophisticated process development as well low to medium volume production applications. This multipurpose furnace has several key aspects integrated and can handle wafers up to 200mm.

    Next to floor space saving advantages the PEO also has Zero energy usage in ambient stand-by. Another unique aspect of the system is the multi process capability when using our easy exchangeable Liners. To reach the optimal temperature uniformity ATV uses 14 Kanthal heating elements which are positioned around, at the front and on back side the process tube and are PID controlled.

    For detailed information please visit www.atv-tech.com.

  • SRO-706 GETTER
    Programmable Solder Reflow Oven / Thermal Reactor / High vacuum Package Lid Sealing System/ Thermal and Electrical Getter Activation...

  • ATV’s approach using the Cold Wall Process Chamber is also applied in the SRO-706 Getter system. This system can be applied for Thermal as well for Electrical Getter processes in R&D and Production line applications. The basis for the Getter system is the successful SRO-706 series IR vacuum reflow oven. Common applications are sealing of packages with kovar caps or optical windows for gyroscopes, microbolometer and various MEMS sensors under high vacuum by applying thermal and/or electrical GETTER activation.

    With its proven direct IR heating approach, ATV applies for the SRO-706 Getter system a top and bottom heating. The IR lamp arrays are independently monitored and controlled as 2 separate heating zones. This results that there is an excellent heating uniformity under vacuum when reaching a maximum temperature of 450°C during the Thermal getter process. When the Electrical getter process is applied a power of 20W can be achieved per package. In both cases the sensor or chip temperature remains below 100°C during the getter activation process. Optionally, a mass spectrometer can be added for residual gas analysis during the sealing process.

    With the special tooling for each different package to be processed a precise package/lid alignment is achieved. Depending on the package size, a load per run can go up to 28 devices. To achieve multiple times higher throughput the getter system can be
    integrated into a glove box system including several baking ovens. When using the glove box option ATV can warrant that the process can be performed in a dry and oxygen free atmosphere.

    The SRO-706 Getter is a result of in-depth cooperation with our customer base and listing to the needs of the market as you may expect form ATV.

    For more information please visit www.atv-tech.com.

  • SRO-i-LINE HIGH VOLUME PRODUCTION
    Our all-new and groundbreaking SRO-i-Line is a high volume production tool used for vacuum reflow soldering. Implementing this tool within the ATV single chamber approach will help to fulfil all your current and future demands...

  • With more than 550 devices in use worldwide ATV is ready to step into high volume production with its brand-new SRO-i-Line. This system can easily be upgraded from the basic one process chamber version to three process chambers all within the same footprint. Each chamber is individually programmable to perform its own process. This allows for the most flexible solution within your production. 

    The SRO-i-Line comes standard with formic acid bubblers and auto refill assembly. This in combination with the standard equipped vacuum pump guarantees the best reflow soldering results compared to any other standard equipment in the market. Formic acid together with vacuum results in significant void reduction over the full reflow soldering area as well as the entire product load.

    With the new generation of flux based solder pastes requiring a very low oxygen content to be present during the process run, the SRO-i-Line has embedded this capability as a standard application to achieve a process environment in the sub-ppm range with minimal nitrogen consumption. Thanks to its flexible design the SRO-i-Line can be tailored to your specific requirements – Manual Loading (ML), Cassette to Cassette (CTC) or directly placed into your automated production line (CB). 

    For more information please visit www.atv-tech.com 

  • SRO-714/SRO-716 IR VACUUM REFLOW SYSTEM
    With its Single Cold Wall Process Chamber approach ATV is setting the benchmark in both the R&D and Pilot Line Production markets....

  • The Solder Reflow Ovens SRO-714 and  SRO-716 offer the perfect tool for reflow soldering applications, rapid thermal annealing and brazing capabilities. Moreover the direct IR lamp heating technology will provide you with a maximum heated surface of 314 mm². With its outstanding process stability and repeatability this tool is found in almost every major R&D center and pilot line production. In order to achieve void free and prefect solder joints ATV applies all of its know-how in cold wall technology, IR heating, vacuum assembly and formic acid.

    Due to its high clearance above the heated surface the system allows for easy handling of IGBT and power electronics packages while the large heated area of both the SRO-714 (217x230mm) and the SRO-716 (314x314mm) offers excellent flexibility. As a result the SRO-714 and SRO-716 can be utilized in every conceivable semiconductor and MEMS application – whether using flux, fluxless or solder paste for your reflow process. When working with the SRO-714 or SRO-716 our 100-Step-Recipe will make programming easy and guarantee superb process results. 

    Just imagine creating a fluxless process via a formic acid enriched atmosphere and receiving perfect void free soldering results – again and again. Due to its very low nitrogen consumption both the SRO-714 and SRO-716 are prepared for the latest generation of flux-based solder pastes which depend on low oxygen content during the process run.

    For more information please visit www.atv-tech.com.

  • PEO-601 MULTIPURPOSE FAST RAMPING FURNACE
    The PEO series is ideal tool for R&D purposes....

  • Since 1982 ATV is manufacturing the multipurpose table top fast ramping furnaces PEOs series with single quartz tube. It was initially developed for thick film paste firing. Since that a large variety of new and different processes and applications was and is still being added. ATV applies its PEO series successfully also in semiconductor market segment. 

    The PEO series is ideal tool for R&D purposes. It can be applied easily for new unique and sophisticated process development as well low to medium volume production applications. This multipurpose furnace has several key aspects integrated and can handle wafers up to 100mm.

    Next to floor space saving advantages the PEO also has Zero energy usage in ambient stand-by. Another unique aspect of the system is the multi process capability when using our easy exchangeable Liners. To reach the optimal temperature uniformity ATV uses 14 Kanthal heating elements which are positioned around, at the front and on back side the process tube and are PID controlled

    For more information please visit www.atv-tech.com.
  • SRO-700 TABLE TOP – IR VACUUM REFLOW SYSTEM
    The SRO-700 table top IR vacuum reflow oven is the essential entry level reflow soldering oven capable of fulfilling all your basic process requirements....

  • Ever since its introduction in 1989 ATV’s Single Process Chamber approach has built a strong reputation in the R&D and pilot line production market.

    And this table top soldering system is the ideal tool for R&D applications as well. With its rapid thermal annealing and brazing capabilities the SRO-700 is equally suited for your basic reflow soldering applications as well as all your R&D assignments. A cold wall chamber principle in combination with the IR lamp heating technology and the vacuum option will reward you with all the required process repeatability and perfect void free solder joints.

    With its 100 mm clearance over the heated surface the system can handle products like IGBT and power electronics packages. Whether using flux, flux less or solder paste the SRO-700 is an incredibly versatile reflow oven for every thinkable semiconductor and MEMS application. Whatever the objective the SRO-700 is ready to handle it all.

    Just imagine creating a flux less process via a formic acid atmosphere and receiving perfect void free soldering results – again and again. Due to its very low nitrogen consumption the SRO-700 is prepared for the latest generation of flux based solder pastes which depend on low oxygen content during the process run.

    For more information please visit www.atv-tech.com.


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