Amcoss GmbH

Leusbundtweg 49a
Feldkirch,  6800

  • Booth: B1121

Wafer processing equipment, chillers, engineering/repair

amcoss GmbH is a high-tech company. We design and build modular fully-automated & semi-automated single wafer spin processing equipment for coating, developing, lift-off, etching, cleaning, and tempering of wafers and substrates. Our machines are configured not only for standard, but also for complex, specialized applications and are absolutely customized for either flexible applications or high throughput.

We also offer a range of plug-and-play heat exchangers and chillers which replace different OEM temperature control units from Neslab, AMAT, LAM and other OEM equipment. In the expert field of optics & mechatronics amcoss designs, manufactures and repairs hiqh-quality optics & components for photolithography, RTP, CVD, EPI, coating, metrology and plasma.

More than 80% of all manufacturers of microchips and semiconductors for communication and consumer electronics worlwide, as well as well-known research and development organisations are amongst our customers. According to a rating of Dun & Bradstreet, amcoss is amongst the best 4% of all companies in Austria in matters of its financial rations (e.g. credit rating). Our business operations are highly efficient and productive.

 Press Releases

  • Automated exchange of data is guaranteed

    Feldkirch/Berlin. Ferdinand-Braun-Institut, Leibniz-Institut fuer Hoechstfrequenztechnik (FBH) in Berlin has already been using two wafer processing systems for some time now, which are now being upgraded with the newly developed, highly convenient amcoss ams PILOT process control software.

    “A software for efficient surveillance and control of the manufacturing process, a so-called Manufacturing Execution System (MES), is currently being introduced at the Ferdinand-Braun-Institut (FBH) to further improve the quality and efficiency of processes and products. The system software from amcoss allows the automated, fast and secure exchange of system and process data with the MES software”, Dr Olaf Krüger explains, Process Technology Manager at FBH. This would not have been possible with the old machine control software that previously controlled the two systems. The upgrade with the modern and self-explanatory ams PILOT software from amcoss was, therefore, a logical and necessary step.

    With the ams PILOT software, FBH has gained a tool with a visually appealing, ergonomic and intuitive user interface. It scores with convenient features such as simple recipe development, integrated scheduling and uncomplicated updates to the latest Windows versions. In addition, the user management noticeably eases the daily work on the systems with several users. “Diverse service features and screens as well as the practical remote maintenance option ensure a high level of serviceability”, amcoss company owner David Erne explains, “and the integrated Energy Safe Mode saves energy and media, increases energy efficiency and conserves resources.”

    The ams PILOT is completely compliant with the E95-1101 semi-standard and can be extended with an optional SECS/GEM interface.

    amcoss equips all amc and amr systems built since 2020 with the ams PILOT software as a standard. Needless to say, all older systems already available on the market by amcoss can also be upgraded with ams PILOT to profit from its advantages and to be brought up to date software-technically. Since the software is platform independent, it can also be adjusted and upgraded to the machinery of other manufacturers at any time.

    For the best reproducibility

    Wafers, with the amcoss systems at FBH Berlin in the production of high-brilliance diode lasers, UV light-emitting diodes, microwave circuits and components for power electronics, are coated with electron beam and photoresists, and exposed wafers are developed. The use of automated technology ensures the highest quality and reproducibility as well as compatibility for industry partners.

    This project was partly funded by the German BMBF within the "Forschungsfabrik Mikroelektronik Deutschland (FMD)" framework under ref. 16FMD02.

    The Ferdinand-Braun-Institut GmbH, Leibniz-Institut fuer Hoechstfrequenztechnik (FBH) is one of the leading institutions for application- and industry-oriented research in microwave engineering and optoelectronics. It researches and realizes electronic and optical components, modules and systems based on compound semiconductors which are key elements for innovation in the social fields of communications, energy, health, and mobility.

    amcoss GmbH develops and manufactures, amongst others, customer-specific fully and semi-automated single wafer equipment for coating, developing, tempering, cleaning, as well as lift-off and etching of subtstrates and masks made of different materials.

    Modern and attractive design of the user interface: the intuitive useability simplifies the handling of the whole system

    Comfortable, and clear service functions simplify serviceability.


  • amr semi-automated single wafer processing
    amcoss amr series is a modular system, perfectly adapted to the requirements of single- & small batch production. The control unit may be flexibly combined according to customer needs & process requirements, with one or more selected processing units....

  • Our amcoss amr series for coating, developing, cleaning, lift-off, vapor priming, and heating of individual substrates is a completely modular system and perfectly adapted to the requirements of single- and small batch series production. The control unit, consisting of the control system with the ams PILOT software, may be flexibly combined according to customer needs and specific process requirements, with one or more selected processing units. Every unit holds one processing module (coater, developer, cleaner, lift-off, hot-/coolplate, vapor priming hotplate or media module). Therefore, our customers can individually compose their personal amr equipment. Depending on the wafer diameters that will have to be processed, the units will be fitted with different processing modules of varying sizes. As a consequence there are two amr types varying in size: amr 200 – for wafer types ø 2“ to 200 mm & Small Pieces amr 300 – for wafer types ø 2“ to 300 mm & Small Pieces.
  • amcoss amc fully automatic single wafer processing
    amc series offers fully automatic single wafer processing equipment for coating, developing, cleaning, tempering, lift-off & etching of wafers. Equipment is set up according to individual requirements regarding throughput & desired processing options...

  • Especially in microsystems technology the requirements to production processes and product quality, as well as cost pressure in wafer processing are high. That´s where amcoss with its wafer processing equipment comes in: we focus on our customers´ needs and on attractive cost-performance calculation. Therefore, every tool may be optimized either for flexible single processes or high throughput. Besides, ams PILOT software independently controls processes in every equipment and therefore supports the operator and optimizes all processes. All 5 amc models have been designed as adaptable platforms, so that individual configurations, process solutions and combinations are standard with amcoss. The footprints, however, are very compact and room saving. With, e.g. amc 1000 you will find 3 processes, 1 wafer-handling-station and up to 4 I/O stations on about 1 m² and you may flexibly process wafer sizes between 2“ and 8“.

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