Sumitomo (SHI) Cryogenics of Europe GmbH

Daimlerweg 5 a
Darmstadt,  D-64293

Germany
http://www.shicryogenics.com
  • Booth: B1221


We welcome you at our booth, let's have a F2F talk soon.

The SHI Cryogenics Group offers innovative cryotechnical solutions for a variety of industries. The products are not only used in the research and medical industry, but are also an indispensable part of the semiconductor and (optical) coating industry.

SHI is the world's leading manufacturer of cryogenic devices, including 4k and 10k cryocoolers for MRI and other cryogenic applications.

The demands on cryopump systems are constantly increasing. Innovative, environmentally friendly cryopumps are needed to fulfil high technical standards. Therefore, SHI developed the SICERA® cryopump to meet the requirements in the mass production of semiconductor wafers, flat screens and other semiconductor-related products.

Quality and service are our trademarks. The combination of selling unique products and providing excellent in-house and on-site service by specially trained service technicians has established our success for many years. Additionally, only our original parts are used in order to meet the highest quality standards and guarantee a long service life.

It is our goal to meet the changing requirements of our customers. Hence, we continuously expand our global sales and service team.

 Products

  • SICERA® Smart KZ-10 Cryopump
    The SICERA® Smart KZ-10 Cryopump is SHI’s mid-size model in the SICERA Smart series. ...

    • With versions specially designed for PVD or ion implantation applications, the KZ-10’s unique double-inverter technology provides customers with higher productivity and energy savings, allowing up to six (6) cryopumps to be paired with two (2) compressors under normal heat load operation.

    For more details, please contact us or visit our website: SICERA® Smart KZ-10 Cryopump - SHI Cryogenics Group

  • SICERA® Ultra KV-10 Cryopump
    The SICERA® Ultra KV-10 Cryopump is the mid-size model in SHI’s SICERA Ultra series, and is designed for PVD applications....

    • The KV-10 offers a reduction in compressor power consumption and an increase in cryopump gas capacity compared to the previous model. 

    Its unique double-inverter technology offers higher productivity and energy savings by allowing up to five (5) cryopumps to pair with one (1) TM-30 Compressor, or 11 cryopumps to pair with one (1) TM-50 Compressor under normal heat load operation.

    For more details, please contact us or visit our website: SICERA® Ultra KV-10 Cryopump - SHI Cryogenics Group

  • TM-30 Indoor Water-Cooled Compressor Series
    The TM-30 Compressor is the smaller model in SHI’s TM series....

    • Available in both low and high-volt versions, this water-cooled, three-phase compressor is designed for use with SHI’s SICERA® Ultra product line.  The TM-30’s patented inverter technology controls the compressor motor speed to optimize its operation, conserve water and lower power consumption.  This unique technology allows for multi-pump operation on a single compressor, keeping the system’s overall compressor footprint to a minimum.

    For more details, please contact us or visit our website: TM-30 Indoor Water-Cooled Compressor Series - SHI Cryogenics Group

  • TM-50 Indoor Water-Cooled Compressor Series
    The TM-50 Compressor is the larger model in SHI’s TM series....

    • Available in both low and high-volt versions, this water-cooled, three-phase compressor is designed for use with SHI’s SICERA® Ultra product line.  The TM-50’s patented inverter technology controls the compressor motor speed to optimize its operation, conserve water and lower power consumption.  This unique technology allows for multi-pump operation on a single compressor, keeping the system’s overall compressor footprint to a minimum.

    For more details, please contact us or visit our website: TM-50 Indoor Water-Cooled Compressor Series - SHI Cryogenics Group

  • CSW-61 Indoor Water-Cooled Compressor Series
    The CSW-61 Compressor is a water-cooled, three-phase compressor designed for use with SHI’s SICERA® Smart and SIGNET® Smart product lines....

    • Available in in both low and high-volt versions, the CSW-61’s patented inverter technology controls the compressor motor speed to optimize its operation, conserve water and lower power consumption.  This unique technology allows for multi-pump operation on a single compressor, keeping the system’s overall compressor footprint to a minimum.

    For more details, please contact us or visit our website: CSW-61 Indoor Water-Cooled Compressor Series - SHI Cryogenics Group

  • Water Trap
    A Water Trap is used to condense water on to the cold panel at a temperature of 100K....

    • We offer two types of Water Trap configuration:

       1. In-line Water Trap, which sits between the Turbo pump and the chamber, to complement the Turbo pumps H2O pumping speed

       2. In-Situ Water Trap, which is installed directly into the chamber to decrease the partial pressure of H2O in the chamber

    Our line up for the In-line, includes an 8” to 12” flange, with optional flange types available. 

    We offer a unique sublimation regeneration process, with no heaters in the system. Regeneration is performed by reverse cycle operation, as with our Cryopump systems, via a control system.

    What is truly unique about the Sicera offering is that a customer is able to operate (5) Sicera 8” Cryopumps and (1) Water Trap from (1) compressor.

    For more details, please contact us or visit our website: SICERA® Smart KZ-08 In-Line Cold Trap (Thin Type) - SHI Cryogenics Group

Categories

202 Other Equipment
  • Space simulation; Vacuum chambers
    • 203 Inspection & Measurement Products
  • Fiber Optic Inspection Instruments
  • Microscopes: Atomic Force Microscopes (AFM)
  • Weight measurement; precision scales
  • X-ray; XRF; 3-D X-Ray; LEXES Systems
    • 206 PV Equipment
  • Thin Film
  • Wafers
    • 207 Process Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
  • Ion; E-Beam Milling Etching Equipment
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants
    • 401 Sub-systems
  • Pumps, Vacuum
    • 502 Material Handling Systems
  • Robotics; Transfer Systems
    • 901 Printed, Organic, Flexible and Large Area
  • Equipment: Roll to roll
  • Equipment: Vacuum deposition
    • 902 Other
  • Other

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