HQ-Dielectrics GmbH

Key Advantages of Platform concept:

• Flexible setup, automatic wafer loading (same chamber)
• Production proven processing chamber (up to 300 mm) and components setup (SEMI certified)
• Unique bridge tool 100 to 200 mm with manual or fully automated production capability
• Precise ambient control, including vacuum capability
• Advanced temperature measurement and control for 50 < T < 1300 degree C
• Independent lamp and power control for individual tuning of linear tungsten halogen lamps
• Corssed lamp fieleds or single side heating
• Fully automated box/susceptor processing up to 1600 degree C
• Ultra-fast cooling capability

Applications for Si, Ge, GaAs, GaN, SiC, etc.

• Annealing / dopant activation / defect dissolution
• Oxidations of various kinds
• ONO (Oxidation - Nitridation - Oxidation)
• Ohmic contact formation
• Silicide formations (NiSi, CoSi2, TiSi2)
• Densification
• Substrate modification (TDA, MDZ, etc.)

Key Features

• Low temperature processing enables simplest process flows without shallow dopant profile redistribution
• Patented Plasma - stick array above the wafer ensures direct plasma control & uniform plasma treatment
• Independent plasma - stick power control for excellent and dynamic tunable uniformity
• Dissociation efficiency of 2.45 GHz plasma enables highest growth rates at low temperature and superior film quality
• Recipe-adjustable wafer to plasma distance controls ionic (anodic) vs. radical oxi-/nitridation, growth rate and ensures flexible process control
• Independently controlable lower IR-lamp array for precise static & dynamic temperature uniformity control
• Multi-step processing / fast gas exchange
• Flexible in wafer size (3" to 300 mm or samples)
• Manual or automatic operation

Applications for Si, Ge, GaAs, GaN, SiC, etc.

• Low- Temperature processing (T< 400 degree C) by advanced temperature measurement
• High conformal low - T oxidation and nitridation
• Interfacial layer growth and deposited layer densification
• Substrate nitridation & oxi - nitridation