Traditional pressure-based MFCs require high inlet pressures to operate. Not GP200 Series - the laminar flow element was designed for low pressure drop and the differential pressure sensor is optimally ranged enabling accurate flow measurement of challenging low vapor pressure process gases used in semiconductor manufacturing.

This exclusive architecture makes GP200 Series a universal P-MFC solution suitable for both standard pressure and critical low vapor pressure gases, ensuring accuracy and repeatability under all operating conditions.

• 35 psia is the typical inlet pressure specification for GP200 Series, but can be configured either higher or lower, depending on your specific application

• Designed to support critical low-pressure process gases including:

  • BCl₃

  • C₄F₆-q

  • C₄F₈

  • SiCl₄

• Cross Talk Insensitive ≤ ±1% of setpoint up to 40 psi/sec inlet pressure spikes

Brooks GF100 Series Metal Sealed Thermal Mass Flow Controllers & Meters

Fast responding, repeatable delivery of process gases with high and ultra-high levels of purity—that’s the performance the GF100 series of metal sealed mass flow controllers and meters provides. Designed for semiconductor, MOCVD and other gas flow control applications, the GF100 series exceeds the semiconductor industry standard for reliability, ensuring repeatable, highly stable performance over time. Standard MultiFlo technology enables one MFC to support thousands of gas types and range combinations without removing it from the gas line or compromising on accuracy.​

Features

The SD1024 GH/GL/GM products are designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024 GH/GL/GM products include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity. The unique optical platform results in highly efficient imaging of spectral information at the image plane of the two-dimensional detector array.

Features & Benefits

• Provides robust endpoint determination
• Can be used with existing SpectraView™ software
• Use for endpoint detection, fault detection, and process diagnostics
• 200 – 800 nm range or 200 – 900 nm range
• For demanding high resolution applications
• Scientific grade TE cooled CCD
• Same optics as SD1024GH

Spectral Reflectometer SP2100 Series

Verity’s SP2100 Spectral Reflectometer is designed for a wide variety of film thickness and depth measurement applications, including those required in etch, CVD and CMP processes. Verity’s Spectral Reflectometers are successfully controlling hundreds of semiconductor process tools worldwide.

The key components of the SP2100 are the SD1024G spectrometer, FL2100 Xenon flashlamp, and SpectraView™ applications software. The heart of the SP2100 is the SD1024G Spectrometer, which uses a scientific grade CCD detector for excellent dynamic range, UV detection capability, and low noise. The SD1024G also has capability for multi-fibre input operation and controls the flashlamp.

The FL2100 flashlamp is a bright, broadband source. The FL2100’s output has a strong UV content, thus enabling the measurement of relatively thin film layers that would not otherwise be possible using a reflectometer. Since a flashlamp is used, the motion of moving wafers does not result in the blurring of data, which enables more accurate measurement.

The SpectraView™ PC host application provides robust film thickness determination through a variety of “open” algorithms. SpectraView™ enables integration with tool-to-application-PC communication based on RS232, Ethernet or DI/O.

Key features

Delivers real-time process fluid concentration measurements for chemical blending, spiking, and dilution without process intrusion or interruption.

• Uses index of Refection for measurement of CMP slurries and nonconductive fluids such as H2O2
• Small footprint with integral electronics minimizes tool size
• HMI software enables real-time data logging, analysis, and customization
• Window cleaning port provides easy access to sapphire window for cleaning

Applications

Maintain purity and safety when transporting electronic-grade specialty chemicals and biopharmaceutical products.

Whether transporting chemical via ocean, land, or rail, we have chemical packaging solutions to meet your compatibility, purity, and regulatory requirements. Our FluoroPure^® composite drums and HDPE blowmolded drums maintain chemical purity while helping to reduce operating costs and improve the value of your chemical product.

We also offer rigid, bioprocessing support containers that provide safe collection, transport, and storage of biopharmaceuticals. With volume sizes from 50 to 1000 liters, our product portfolio has a solution for your most demanding shipping needs.