The Front End batch plasma systems of PVA MPS are designed to provide a higher throughput for less sensible wafer plasma applications. For higher uniformity demands, MPS offers its single wafer plasma family GIGAfab.
GIGAbatch plasma systems are available for 6” and 8” wafer diameter and in a variety of different equipment levels and machine options. Coming from the “M” level with its manual loading door, the next step is the “P” level with automatic loading door and cleanroom suitable stainless steel and glass surfaces. The highest level regarding equipment and performance is the GIGAbatch A380P. This machine type is equipped with a so-called WTU; a wafer transfer unit. Such kind of unit is connected to the automatic door of the plasma system. A wafer containing magazine can be placed on the WTU, and the WTU is automatically transferring the wafers from the magazine into a quartz boat on the loader door. After this handover of the wafers to the machine, the machine is now able to plasma-treat the wafers automatically.