Megasonics nozzles up to 5 MHz
SONOSYS® proudly presents highly effiecent contact-less cleaning with Megasonic nozzle systems. In a wide range of frequencies ranging from 600 kHz up to 5 MHz, even smallest structures can be cleaned reliably from nano particles without damaging fragile structures.
The transducer in the Megasonic nozzle generates a Megasonic wave, which is transmitted through a flowing liquid (e.g.: DI-water) to the surface of the substrate. With up to 35 W concentrated on a small point of only 4 mm results in superb results in contactless cleaning. The dual nozzle works with two distinct frequencies and provides removal of a wider range of particles.
Cleaning of single wafers, masks, LCDs, substrates and micro electro mechanical systems (MEMS). The 600 kHz system is used in the optics and medical industries to remove larger particles.