VON ARDENNE GmbH

Am Hahnweg 8
Dresden,  D-01328

Germany
http://www.vonardenne.biz
  • Booth: B1567


Let's talk about how our equipment can help you succeed!

With more than 60 years of experience in electron beam processes and 45 years in magnetron technology, VON ARDENNE is one of the leading providers of equipment and technologies in PVD thin-film technology and vacuum process technology.

Besides the large-area PVD coating systems for glass and photovoltaics applications, VON ARDENNE offers dedicated platforms for microelectronics, sensors, optoelectronics, advanced packaging, power devices and photonics.

These platforms are modular and can be configured according the desired productivity, special requirements, different coating technologies, pre- and/ or post-treatment. They may also be combined with automation solutions for the substrate handling into and out of the system.

With this modularity, a wide range of applications from R&D to testing and pilot- production up to highly-volume mass production can be covered. What is especially interesting is the upgradability of the equipment, the fact that machines can “grow” along with the needs of our customers and our flexibility to adapt our equipment for new special applications.

With our network of subsidiaries, you can rely on a high-quality service and a strong technology support provided worldwide.

 Products

  • HISS
    HORZONTAL COATING SYSTEM...

    • The HISS is a mod­u­lar vac­uum coat­ing sys­tem with a car­rier-based sub­strate trans­port. It is the per­fect choice if you are look­ing for highly flex­i­ble pro­duc­tion equip­ment with a small or medium through­put equipped with proven tech­nol­ogy.

    Thanks to its mod­u­lar de­sign, the HISS can be con­fig­ured ac­cord­ing to your needs. We of­fer var­i­ous ba­sic con­fig­u­ra­tions of the sys­tem such as the sin­gle-ended ver­sion for a smaller pro­duc­tion scale.

    The sys­tem of­fers a high process flex­i­bil­ity as the process cham­ber can be con­fig­ured with pla­nar or ro­tat­able mag­netrons. Ion pre-treat­ment or heat­ing and cool­ing units are avail­able upon re­quest. All aux­il­iary cham­bers, like en­try / exit, buffer and trans­port cham­ber, can be up­graded in a sim­i­lar man­ner.

    The flex­i­ble and dy­namic de­sign of the sys­tem with stan­dard­ized sub­com­po­nents en­ables cus­tom-made con­fig­u­ra­tions. That means that the sys­tem can be adapted to new processes or re­quire­ments. There­fore, our cus­tomers are able to act very dy­nam­i­cally and can adapt to the evo­lu­tion of their prod­uct.

Categories

205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 206 PV Equipment
  • Thin Film
  • Wafers
    • 207 Process Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
    • 401 Sub-systems
  • Plasma Sources; Controls; Monitoring; Diagnosis
    • 701 Manufacturing Services or Consulting
  • Product Development; Software Design; Product Lifecycle Management

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