GEMU, Gebr. Muller Apparatebau GmbH & Co. KG

Fritz-Mueller-Strasse 6-8
Ingelfingen,  D-74653

Germany
http://www.gemu-group.com
  • Booth: B1738


Solutions for semiconductors and battery production

Since 1988, GEMU has been an industry leader in the production of high purity valves, measurement and control systems. Our dedication to quality has earned us many loyal customers in the microelectronics industry. GEMU High Purity Products are developed and produced specifically for use in process equipment, ultra pure water and chemical manufacturing and distribution systems, for microchip production. All products are produced under clean room conditions (class100). PRODUCTS: NEW: CleanStar SmartLine HPS PP valves CleanStar® HP PFA valves FlareStar® HP PFA tube fittings HydraLine® HP PFA pressure gauges and sensors TubeStar® HP PFA tubing pureplus® PVDF-HP, PP-HP diaphragm valves; PVDF-HP flow meter SonicLine® HP PFA ultra sonic flow meter Back pressure control system Stainless Steel diaphragm valves for solvent supply Control systems and accessories

 Products

  • GEMÜ C53 iComLine
    Motorized control valve for ultra pure applications in the semiconductor industry...

    • Areas of application
    • Lithography
    • Chemical mechanical polishing (CMP)
    • Etching processes
    • Analysis

    Features
    • High-resolution linear actuator with stepper motor
    • Diaphragm globe valve based on the iComLine series
    • Tried and tested plug diaphragm design
    • All media wetted parts are made of PFA or PTFE
    • 1 million qualified control switching cycles
    • Cleanroom manufacturing (HP version), complies with SEMI F 57
    • Low space requirement due to compact design
    • Can be integrated into manifolds and M-block valves
    • Suitable for ultra pure, corrosive media

Categories

400 Components, Parts & Accessories
  • Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
  • Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Plumbing Fittings
  • Sensors
    • 401 Sub-systems
  • Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
  • Ultrasonic Generators; Transducer and Monitoring Systems

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