Traditional time-averaged methods (IC, GC/MS) for cleanroom air analysis can result in delayed responses to events or miss them entirely. The unique attributes of SIFT-MS (Selected Ion Flow Tube-Mass Spectrometry) enable the speciation and quantitation of volatile compounds in real-time. SIFT-MS is a single solution for online monitoring of cleanroom-relevant organic and inorganic (incl. NH3, H2S, PH3, HCl, HF) airborne molecular contaminants (AMCs) in semiconductor fabs. Sensitivity reaches pptv levels in a direct,single analysis and without sample preparation or chromatographic separation.
Benefits of SIFT-MS include:
- Direct analysis without chromatographic separation: ideal detection of volatile solvents
- Ultrahigh-throughput screening via autosampler integration provides rapid warning of quality issues and greatly reduces the cost/analysis
- Wide linear dynamic range: one instrument for multiple screening tasks
- Green, solvent-free analysis for assuring environmentally friendly products