Ebara Precision Machinery Europe GmbH

Mühlweg 2C
Sauerlach,  82054

  • Booth: B1221

Process Technology meets Sustainability!

EBARA is a leading global manufacturer of vacuum and semiconductor systems used especially in the semiconductor industry for manufacturing wafers, liquid crystals, solar cells and other products requiring advanced technology. For complex industry requirements e.g. vacuum and gas abatement, EBARA offers integrated solutions. EBARA Precision Machinery Europe GmbH (EPME) is part of the EBARA Group, Japan, and employs approximately 170 people in Europe. The portfolio includes dry and turbo molecular vacuum pumps as well as gas abatement systems. In addition, EPME sells state-of-the-art CMP tools, wafer bevel polishing and substrate plating systems. In Europe, EPME has a central warehouse and two overhaul centres for vacuum pumps. EBARA is No 2 on the world markets for vacuum pumps and CMP tools. 80% of the top 20 of semiconductor manufacturers are EBARA customers. Worldwide the semiconductor industry counts on EBARA solutions. Our mission is to support the globe. That meas innnovative technology meets sustainability. 

Contact: [email protected]


  • Bevel Polishing Systems
    EBARA’s bevel polishing systems employ novel polishing techniques to process the bevel and backside of the wafers. Improve the yield rate of semiconductor production....

  • EBARA's bevel polishing systems employ novel polishing techniques to process the bevel and backside of the wafers - an area that has attracted attention in recent years as a source of defects and amid efforts to improve the yield rate of semiconductor production. 

    As the main source for wafer yield loss, our bevel polishing systems not only remove damages to the wafer edge, but also clean and reshape the bevel for high volume production fully automated systems. 

  • CMP Systems
    As the No 2 worldwide, EBARA provides the semiconductor industry with design and performance for 150mm, 200mm and 300mm wafer production....

  • The F-REX200M2 polishes 200mm wafers with k-materials and aluminium layers. Equipped with user-oriented system configuration, the modular design is suitable for multiple process setups.  Also available for 150mm wafers. 

    The F-REX300 polishes 300mm wafers. With four platens and a layout for different parallel and serial polishing modes to target Cu and other advanced applications. 

  • EBARA dry vacuum pumps
    EBARA as No.2 on the world market for vacuum pumps, offers a wide range of dry vacuum pumps and turbo molecular pumps. Combined with gas abatement systems, we have an integrated solution with significant cost benefits....

  • Customers appreciate the excellent cost of ownership of EBARA pumps. The EV-S series is perfect for big energy savings and small footprints. The flexible rotation speed and idle mode make their contribution to save energy. In clean applications no N² purge or nitrogen is required.
  • Turbo moluecular pumps
    Compact. Resistent. Powerful. For high tech applications....

  • Magnetic levitated, hydrocarbon-free turbo pumps for ultra-high vacuum. Find the right turbo molecular pump for your application.
  • Gas abatement systems
    For universal abatement applications....

  • Keep the environment clean and take care of sustainable gas abatement is our job. Our burner washers ensure high safety standards and clean within the closed system.

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