RECIF Technologies S.A.S

The COMPACT G5+ Sorter  is RECIF Technologies 300mm standard solution for Si handling. Its innovative design offers a seamless integration thanks to its field proven modules and technologies such as real time filed bus, direct drive transmission and many other technical advances.

The COMPACT also provides a high throughput with the smallest footprint and has demonstrated unsurpassed cleanliness, as well as extremely secure wafer handling.

COMPACT G5+ wafer sorter brings IC manufacturers the ultimate productivity solution for 5nm nodes and beyond.

The SMART is a versatile design allowing fast adaptation to customer requirements and suits for emerging applications.

Adopting a modular design, a common robotics core is interfaced with several loading stages and end effectors assisted by a highly configurable and adaptative robotic software controller.

The SMART addresses the challenges raised by standard Si applications and emerging applications such as 3D IC and advanced packaging.  

With its high flexibility and versatility, the SMART is fully adaptable with different module's type (metrology, inspection, process). 
Moreover, Recif Tool Controller has proven compatibility with the leading equipment software controllers on the market.

• Single or dual handler; Single or dual aligner
• Flexible integration scenarios
• EFEM compatibility demonstrated with main software controller
  • (PEER Group PTO V7.2 , AIS Tool Commander, Agileo A²ECF)
• Flexible and robust robotics based on 450mm design demonstrated at imec
• Robotics compatible with 300mm (Si, compound, glass), 450mm, dicing frames
• Successful integrations in 2018 with OEM modules within EU project