Levitronix GmbH

Technoparkstrasse 1
Zurich,  CH-8005

  • Booth: B1005

Levitronix® – Better Products for Better Yield!

Levitronix® develops, markets, and sells ultrapure pump systems, mixers, blowers, flow sensors and flow control systems to the Semiconductor Industry. Levitronix® products are based on magnetically levitated bearingless motor technology, which allows for contact-free, and thus, particle-free operation. With no mechanical wear, Levitronix® pumps are ideal for CMP slurry handling, metal plating processes, wet cleaning and etching, and high purity fluid transfer and delivery. Levitronix® pumps deliver continuous flow allowing for precise electronic control of flow and pressure. The Levitronix® pump systems are designed for ultrapure fluid applications where extremely low particle shedding and metal contamination are required. Tests conducted by an independent laboratory prove that particle generation from a Levitronix® pump is significantly less than that from diaphragm pumps. Comparative tests among Levitronix®, bellows and diaphragm pumps, conducted with CMP slurries, showed the Levitronix® pumps producing 200-1,000 times fewer large particles which can scratch and damage wafers.

Highest market share of liquid pumps in: • CMP slurry delivery • Single wafer cleaning • Electrochemical deposition

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