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Category: 204 MEMS Equipment
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Appointment Date*
Tuesday, Nov 16 2021
Wednesday, Nov 17 2021
Thursday, Nov 18 2021
Friday, Nov 19 2021
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Tue Nov, 16
Wed Nov, 17
Thu Nov, 18
Fri Nov, 19
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28 Exhibitors
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101 Photovoltaic Device Manufacturing
PV: Cells
PV: Modules
PV: Stand-Alone Systems
PV-Building-Integrated Solutions
Solar Thermal
200 Packaging and Assembly Equipment
Backgrind; Slicing; Lapping; Polishing Equipment
Ball Placement; Attach Systems
Base Loader Systems
Cleaning; Washing Equipment for Assembly & Packaging
Cut & Down Set; Trim; Form Equipment
Device Handling; Feeding Systems
Dicing; Sawing; Scribing; Separation Equipment
Die Bonding; Attach Equipment
Die Sorter; Pick & Place; Flip Chip Placement Systems
Dispensing Systems
Hot Embossing System
Lithography Systems for Wafer Level Packaging; Bumping; 3D Interconnect Aligners
Marking; Imprinting; Labeling Equipment
Molding; Encapsulation; Decapsulation Equipment
Package Handling; Conveying Equipment
Package Simulation; Characterization Equipment
Plating; Electro Chemical Plating for device assembly
Printed and Organic Electronic Equipment
Solder Reflow; Soldering & Brazing Equipment
Wafer Level Bonders
Wafer Mount; Taping Equipment
Wire Bonding Equipment
201 Flat Panel Display Equipment
Alignment Film Coating Equipment
Anodic Oxidation Equipment
Color Pattern Processing Equipment
Low Pressure Plasma Spray (LPPS) Equipment
Luminous Layer Patterning and Sealing Equipment
Panel Alignment; Cell Assembly Equipment
Scribe and Break Equipment
Seal Patterning Equipment
Spacer Spraying Equipment
202 Other Equipment
Cutting; Drilling; Laser ablation; Beveling Equipment
Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
Lamination; Sheet Laminating Equipment
Repair; Rework Equipment
Space simulation; Vacuum chambers
Vacuum drying & out gassing Systems
Vibration Isolation Systems
Vision; ID; Bar Code Systems
Welding Equipment
203 Inspection & Measurement Products
Air Velocity (VA) Humidity and Moisture Sensing
Chromatograph
CV (capacitance-to-voltage) Probe systems
Defect; Particle; Bump; Contamination Detection, Review or Inspection
Die Inspection; Die Shear
ESCA; Ultrasonic; Acoustical Microscopes
Fiber Optic Inspection Instruments
Film Thickness; Thickness; Uniformity Measurement; Ellipsometer
Flat; Notch Finding System
Instruments; Bench Top Test
Leak Detection Systems - Vacuum or Gas
Line Width; Critical Dimension (CD) Measurement
Microscopes: Atomic Force Microscopes (AFM)
Microscopes: Confocal Scanning Microscope; 3-D Video Microscopes
Microscopes: Optical Microscopes
Microscopes: SEM; Focused Ion Beam (FIB), TEM
Overlay Measurement
Package Inspection; Lead Scanners
Particle Monitors; Analyzers - Airborne or Liquid
Plate Inspection Equipment
Resistivity Measurement; 4 point probe; Sheet resistance
Spectrometers; FTIR; ATR-FTIR; Auger Electron (AES); SIMS
Stress; Refractive Index; Reflectivity & Conductivity Measurement
Thermal Sensing, Measurement, Analysis
Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation
Weight measurement; precision scales
Wire Bonding Inspection; Test
X-ray; XRF; 3-D X-Ray; LEXES Systems
204 MEMS Equipment
Deep RIE etching; Dry Etching
Double sided mask aligner
Wafer Level Bonders
205 Nanotechnology Equipment and Tools
Equipment, Nanotechnology Tools
206 PV Equipment
Cells
Inspection and Metrology
Integration and Automation
Modules
Other
Thin Film
Wafers
207 Process Equipment
Bumping Systems
Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
Coat; Develop; Resist Processing; Track Equipment
Crystal Growing & Machining Equipment
Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
Environmental Enclosures; Minienvironments
Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
Etching; Stripping; Ashing - Dry and Wet Equipment
Ion Implantation Equipment
Ion; E-Beam Milling Etching Equipment
Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
Plating; Electro Chemical Plating; Deposition Systems
SOI Bonders; Temporary Bonders; De-Bonders
Spin on Glass (SOG); on Dielectric (SOD) Track systems
Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
Transfer Systems for Wafer; Reticles or FPD's
Wafer Identification; Marking Equipment
208 Test Equipment
Burn-In Accessory Systems
Burn-In Systems
Circuit Repair; Design Modification; Redundant Memory Repair; Mask Repair Systems
Discrete Component Test Systems
Environmental Stress Systems - Temperature; Humidity; Pressure; HAST
ESD; EMS and Latch-up Systems
Failure Analysis Systems
FPD Test; Measurement; Repair Equipment
Functional Test Systems
Handlers; Positioner Systems
Linear Test Systems
Logic Test Systems
Memory Test Systems
Optical Test Systems
Package Test Systems
Parametric Test Systems
Printed Circuit Board; Wire Board (PCB or PWB) Test and Repair
Probe Card Maintenance and Analysis Systems
Probing Equipment incl. Analytical; Circuit; Manual; E-Beam; Optical; Wafer Probers
System on a Chip (SOC); Mixed Signal Test Systems
Test Contactor Cleaning; Conditioning Systems
Test Head Manipulators and Docking Stations
Wireless, non-contact Test Systems
300 Packaging and Assembly Materials
Adhesives; Epoxies; Die Attach Compounds; Under fill Materials; Conductive & Non-Conductive
Bonding; Interconnect Materials - Wire; Ribbon; Tape; Capillaries & Tools
Molding; Encapsulation; Potting; Resin Materials
Packages; Ceramic and Other High Temp Compounds
Packages; Plastic
Preforms; Lids
Printed Circuit Boards (PCB); Printed Wire Boards (PWB)
Scribe Tools; Saw or Dicing Blades and Accessories
Thermal Interface Materials; Heat Sinks
Thick Film Pastes; Materials
Thin Film; Dielectric Film Materials
301 Chemicals & Solids
Acids; Etchants
Buffers; Alkalis; Bases
Cleaning Chemicals; Solvents; Strippers
DI; UP Water
Dopants; liquid or solid
Other Specialty Chemicals
Photo Resist; Developers & Ancillaries (incl. Adhesion promoter (HMDS); Primer; Anti-Reflective Coat
Solids
Spin on glass material
Surface protection material; coatings
302 FPD Materials
Alignment Film Materials
303 Gases
Analytical Instrumentation Mixtures
Dopant Gases
Environmental Compliance Mixtures
Etchant Gases
Fuel Gases
Other Specialty; Mixed Gas
Pure & Bulk Gases
Rare; Noble Gases
Reactant Gases
Silicon Precursor Gas
304 Mask Making Materials
Mask and Reticle Handling Products
Mask plate blanks; Glass
Pellicles; Mounting Fixtures
Plate or Pellicle Repair & Materials
Transfer lithography masks; Polymer masks; templates (for Nanoimprint)
305 Nanotechnology Materials
Nanotechnology Materials
306 PV Materials
Gases and Liquid Chemicals
Ingots, Wafers
Other
307 Process Materials
CMP; Grind; Lap; Polish; Abrasive materials
Deposition Supplies
Deposition/Target Materials
Photo Masks; Finished or Patterned
Plasma; Ion Sources
Plating Materials
Process Chamber Components; Graphite; Carbon Fiber Carbon (CFC); Pyrolytic Boron Nitride (PBN)
Quartzware (Silicon Carbide, Fused Quartz Glass, Sapphire), Ceramic & Oxide Ceramic Fixtures
308 Substrates
Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.)
Diamond substrates
Gallium Arsenide (GaAs); Sapphire Substrates
Prime; Polished; Mirrored Wafers
Silicon on Insulator (SOI); Silicon on Sapphire (SOS); Silicon Carbide;
Strained silicon; Engineered Substrates
Test; Monitor Wafers; Reclaim or Virgin
Thin & Thick film substrates for MEMS
309 Test Materials
Burn-In Boards; Performance Boards (incl. Low; High Temp and Ceramic)
Probe Cards; DUT boards and other probing accessories (incl Ceramic and Special Purpose Probe Cards)
Structural Circuits; Test; Thermal Fixturing
Test Sockets; Contactors and Contact accessories
400 Components, Parts & Accessories
Bearings; Shaft Collars
Chucks for Wafer and other Substrates
Computer Accessories; Peripherals; Upgrades; Service
Connectors; Plugs; Interconnects; Cable; Wire
Enclosures; Cabinets
Fasteners; General Hardware
Filters for Liquid; Oil
Filters, Getters, Purifiers, Catalysts for Gases
Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
Gaskets; Seals; O rings; Elastomers; Resins
Heating elements; coils; insulation; vestibule blocks and other Furnace components
Lamps (non Lithography), all type UV; LED and other
Lamps for Lithography
Magnetic Components; Heads
Motors; Fans; Electric Rotary Spindles
Piezo Electronic Components
Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Plumbing Fittings
Raw Material & Custom components; Metal
Raw Material & Custom components; Plastic
Sealants; Adhesives; Finishes
Sensors
Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants
Windows
401 Sub-systems
Cameras - Still; CCD; Video & Monitors
Computer; Control; Communication; Data Acquisition Systems
Electron tube & Ion Beam Apparatus & Sources
Exposure; Illumination Sources - Laser; Lamp; X-ray & other
Gas; Liquid delivery panels as subsystems
Handling; Transfer; Loading Systems; Lifting devices
Hydraulic Systems
Motion control systems; Servo control systems & Components
Optics; Lens Products; Auto-Focus Systems
Plasma Sources; Controls; Monitoring; Diagnosis
Pneumatic Systems; Pneumatic rotary spindles
Power Supplies; RF Generators; Converters; Electrical Conditioning
Process Monitoring systems
Pumps, for Fluids
Pumps, Vacuum
Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
Ultrasonic Generators; Transducer and Monitoring Systems
402 PV Systems
Chargers, Batteries
Inverters
Measurement and Control Technology
403 PV Components, Tracking and Mounting Systems
Mounting Systems
Tracking Systems
500 Factory Monitoring & Control Systems (FMCS)
Chemical; Pure Water; Fluid Handling; Storage; Supply Systems
Chemical; Pure Water; Fluid Monitoring & Control Systems
Data Collection; Building control systems
Emergency (fire) & Security Control Systems
Environmental; Utility Systems & Monitoring
Equipment Interface; Communication Protocols
Gas and Other Generation Systems
Gas Handling - Cabinets; Control; Supply Systems
Gas Monitoring Equipment; RGA's; TGO compliance
Logistics; Floor Control Systems
Process Controls
Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)
501 HVAC, Temperature, Humidity, Contamination Control
Clean Rooms
Contamination Control; HEPA Filtering Systems
HVAC; Temperature; Humidity Systems and Control
502 Material Handling Systems
Conveying; Material Handling Systems
Robotics; Transfer Systems
Static; ESD Control
Stockers; Storage, AMHS
600 Communication Software
Equipment Interface; Communication Protocols
601 Design Software
CAD - Computer Automated Design
602 Manufacturing Software
CAM or CIM - Computer Aided Manuf'g; Computer Integrated Manuf'g
Factory Automation; Cell Controller Software
Manufacturing Execution Software (MES)
Production Control software
Test Programs
Yield Mgmt; Process Control Software
603 Simulation, Analysis; Modeling Software
Mask Making software & simulation
Simulation; Characterization; Verification Software
700 Manufacturing Services
Building Maintenance
Burn-In Service
Calibration & Reference Standards
Certification; Compliance; Independent Laboratories
Deposition Service
Etch; Strip; Cleaning Service
Failure Analysis and other Analytical Services
Ion Implant Service
Lithography; Patterning service
Machine Shop; Fabrication Service
Mask Making Fabrication and Repair
Measurement; Inspection Service
Micro Machining services (small hole drilling and milling)
Parts Cleaning; Micro Contamination
Plating; Electro Polishing; Coating; Surface Treatment
Reclaim Services
Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
Sawing; Lapping; Grinding; Polishing Service
Used; Rental Equipment; Inventory Reduction, Appraisal - Brokers; Resellers
Wafer Bumping Service
Welding; specialty welding services
701 Manufacturing Services or Consulting
Assembly
Automation & Robotics
CAD; CAM; CIM
Circuit Design; Electronic Design Services (EDS); System Level Design (SLD)
Clean Room; Contamination Control
Environmental, Health & Safety
Equipment; Hardware; Product Design, Integration and Manufacturing
Facilities; Building Environmental Systems Design & Monitoring; Alternative Energy Solutions
Facility Design; Construction; Architectural
Factory; Industrial Control; Utilization & Automation
Flat Panel Display (FPD) Design & Manufacturing
Manufacturing Process Support and Development
Nanotechnology Intellectual Property Development; Research
Package Materials; Interconnect; Subcomponent; Subassembly Design Services
Package Simulation; Characterization Services
Product Development; Software Design; Product Lifecycle Management
Software Programming; Software Development
Technical Intelligence; Reverse Engineering
Test Services or Consulting
Wafer Fab Operations and Design
Wafer Handling
Waste Control; Disposal Design
800 Associations
Associations; Trade or Industrial
Professional Societies
801 Distribution and Logistics
Crating; Packaging
Customs Clearance; Import/ Export; Freight Forwarders
Distribution, Warehousing, 3rd Party Logistics Providers (3PL)
Transportation; Rigging
802 Educational; Research Institutions
Education; Research Institutions (For-Profit); Vocational Training
Education; Research Institutions (Non Profit); Academia; Schools
803 Financial Services
Investor Relations
Venture Capital
804 Professional Services
Government Advocacy; Regulation; Economic Development Agencies
IT; Data Processing Services
Market Studies; Market Research Organizations
Marketing or Sales Consultants
Operations; Management Consulting
Personnel Services; Employee Assistance; Recruiters; HR
Property Management; Real Estate
Public Relations
Publications or Magazines; Printing
Purchasing; Procurement; Materials; Supply Chain Management Services
Sales; Manufacturers Representation or Distributors
Trade Shows; Conference; Symposium Coordinators
Web hosting; Design; Internet consulting; Systems Integration
805 PV Services
Education, Training
Research and Development
900 Support Products
Analytical Standards; Calibrators
Clean Room Supplies; Cleaning Supplies
Device; Wafer; Display Panel Handling Products
Furniture; Storage; Cabinets
Laboratory Apparatus and Supplies
Safety
Tools
901 Printed, Organic, Flexible and Large Area
Device Manufacturing: Batteries
Device Manufacturing: Display
Device Manufacturing: Electronic
Device Manufacturing: Integrated systems
Device Manufacturing: Lighting
Device Manufacturing: Photovoltaic
Device Manufacturing: RFID
Device Manufacturing: Semiconductor
Device Manufacturing: Sensors
Device Manufacturing: Wearable electronics
Equipment: Clean room
Equipment: Curing
Equipment: Inspection
Equipment: laboratory
Equipment: Material Handling
Equipment: Printing, coating
Equipment: Process integration & control
Equipment: Roll to roll
Equipment: Systems
Equipment: Vacuum deposition
Materials: Consumables
Materials: Gases and Liquid Chemicals
Materials: Inks, pastes, printing
Materials: Inorganic
Materials: Organic
Materials: Other
Materials: Substrates, encapsulation, packaging
Services: Education, Training
Services: Research and Development
Services: Testing Institutes
902 Other
Other
903 Electronic Components
Components: Low Power Electronics
Components: Flexible Electronics
Components: IC's
Components: IDM / Foundries
Components: MEMS
Components: Sensors
Design: Fabless
Design: Modelling
904 Electronic Applications
Energy Efficiency: Energy Harvesting Solutions
Energy Efficiency: High voltage solutions
Energy Efficiency: Low Power Electronics
Energy Efficiency: Power electronics
Energy Efficiency: Power Supplies and Batteries
Healthcare: Device Implants
Healthcare: Flexible Intelligent Devices
Healthcare: sensors
Imaging: Camera and Camera Modules
Imaging: CCD, CMOS and organic sensors
Imaging: Image Processing, Software and System
Imaging: Optics and Micromechanic
Lighting: LED
Lighting: OLED
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COMPANY NAME
BOOTH#
EV Group (EVG)
B1460
Fraunhofer IPMS - Institute for Photonic Microsystems
B1221
Innodys Sarl
B1445
KLA Corporation (SPTS Division)
B1261
MAFU Robotics GmbH
B1812
MEMSSTAR
B1430
Merconics GmbH & Co. KG
B1650
MUEGGE GmbH
B1254
Nanotech Digital GmbH
B1576
Nikon Precision Europe GmbH
B1219
Novel Technology Transfer GmbH
B1021
Osiris International GmbH
B1125
Oxford Instruments
B1151
PANASONIC INDUSTRY EUROPE GmbH
B1557
Planar JSC
B1635
Plasma-Therm LLC
B1758
POSAS GmbH
B1137
PTS
B1536
S3 Alliance GmbH
B11003
Sairem
B1654
scia Systems GmbH
B1567
Semiconductor Technology Limited
B1430
SENTECH Instruments GmbH
B1317
SET CORPORATION SA
B1112
SiSTEM Technology Ltd
B1133
SUSS MicroTec
B1241
Trymax Semiconductor Equipment B.V
B1351
Ulvac GmbH
B1730