Hochstrasse 4-6
Reichelsheim,  D-64385

  • Booth: B1254

For more than 25 yrs, MUEGGE has developed, produced and supplied high-quality microwave solutions for complex process requirement. MUEGGE is a leading developer, manufacturer and provider of plasma source solutions, industrial microwave heating systems, components and hardware. MUEGGE’s product offering includes scaleable plasma sources (200mm2 -->1000mm2), Low pressure sources, Remote Plasma Sources (RPS), PFC abatement sources, Deposition sources, Etch/Strip sources, Microwave ECR sources, plasma monitoring, tuning and measurement devices. Typical operating process pressures of 0.3 – 5.0 Torr with typical process gas flow from 500sccm – 10slm. MUEGGE standard products can operate in either CW or pulse power ranges from 300 W to 100 kW, with frequencies of 915, 2450 and 5800 MHz. MUEGGE plasma source markets include Architectural Glass, Disk Drive, Flat Panel Display, Semiconductor, Photovoltaic, Material Processing and industrial applications.

Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".