Global Technology Centre
Innovation Drive
Burgess Hill,  RH15 9TW

United Kingdom
  • Booth: B1371

Sustainability through Collaboration

Edwards is a leading manufacturer of sophisticated vacuum products and abatement systems and a leading provider of related value-added services for the manufacture of microelectronics devices, including silicon and compound semiconductors. Our innovative leading technology solutions are designed to maximize process uptime, yield and throughput, whilst striving to balance the often conflicting requirements of: lower cost of ownership through reduction in consumables usage (electrical power, fuel gas, nitrogen and cooling water); reduced environmental emissions and safety compliance (noise, vibration, sub-fab particles, waste gas and waste water); extended product lifetimes and reduction in on-going service costs.



  • Protecting your productivity – iXM XCEDE
    The harshest of chamber processes demand the toughest vacuum solutions. The new iXM dry pump, the world’s most advanced, now combines with Edwards unique XCEDE surface layer technology, to manage the harshest of chamber manufacturing processes. ...

  • With iXM you can expect many benefits.

    Expect to manage the simultaneous challenges of both corrosive and condensable, process chamber gas byproducts.

    Next… expect improved power efficiency …up to 60%.

    Thirdly, expect improved particulate management and minimal byproduct accumulation from condensation and plating, which is made possible because we optimise the pump with a widely settable temperature range relative to each process.

    Watch this video to see how XCEDE protects your productivity.

    The big story here is Edwards’ XCEDE

    Working with leading material experts, we developed a whole new treatment technology to tackle critical semiconductor processes that produce highly corrosive byproducts.
    XCEDE protects critical pump components such as rotors and stators and outperforms all competing methods, across all criteria. In fact, it delivers extraordinary field test results.

    In all, iXM, treated with XCEDE, delivers greater reliability, longevity and lower cost of ownership. Edwards’ XCEDE-enhanced, corrosion-resistant technology for harsh environments, means a pump series like no other.

    Ask us about our XCEDE upgrades for your existing dry pumps.

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