The M-RES systems are non contact resistance measurement systemss with Eddy Current method for semiconductor applications is a non-destructive way to measure your wafers! It is indepent from the surface and can be used with non-conductive layers on the surface of the samples. It is possible to use on bulk samples or conductive layers coated.
We offer manually operated system for laboratory, but also manally loaded system with mapping capability. Furthermore we offe fully automatic system with wafer loading and mapping capability.
- Resistivity range from as low as 1mOhm up to 100kOhm
-Wafer diameter up to 300mm
- Wafer thickness up to 2mm