Syft Technologies GmbH

Hilpertstraße 31
Darmstadt,  64295

  • Booth: B1456

Higher production yields by fast & sensitive SIFT analysis.

Production of modern semiconductors at high yield requires ultra-high purity reagents, very low emission transportation and stringent air quality controls in the fab. Volatile or semi-volatile contaminants in the air can degrade semiconductor performance and/or greatly shorten expensive maintenance cycles or operational service of fabrication equipment.  Conventional analytical methods have essential gaps in the required combination of high sensitivity, the wide range of chemicals used and the need for high time resolution. Syft's propriety technology SIFT-MS provides rapid, high-sensitivity analysis of air for the widest range of airborne molecular contaminants (AMCs) in the semiconductor and related industries, greatly reducing product loss and equipment failure and is the only solution that fulfills all these requirements in a single tool. Benefits include 24/7 operation with minimal downtime, real-time AMC monitoring for instant feedback on release events and simple integration with existing sample delivery infrastructure.


  • Voice200 Infinity
    Designed for the demanding cleanroom monitoring, the Voice200 Infinity is the class-leading solution for real-time, high-sensitivity AMC analysis. It provides full control of the widest range of compounds with unmatched detection limits in 24/7 routine....

  • Traditional time-averaged methods (IC, GC/MS) for cleanroom air analysis can result in delayed responses to events or miss them entirely. The unique attributes of SIFT-MS (Selected Ion Flow Tube-Mass Spectrometry) enable the speciation and quantitation of volatile compounds in real-time. SIFT-MS is a single solution for online monitoring of cleanroom-relevant organic and inorganic (incl. NH3, H2S, PH3, HCl, HF) airborne molecular contaminants (AMCs) in semiconductor fabs. Sensitivity reaches pptv levels in a direct,single analysis and without sample preparation or chromatographic separation.

    Benefits of SIFT-MS include:

    • Direct analysis without chromatographic separation: ideal detection of volatile solvents
    • Ultrahigh-throughput screening via autosampler integration provides rapid warning of quality issues and greatly reduces the cost/analysis
    • Wide linear dynamic range: one instrument for multiple screening tasks
    • Green, solvent-free analysis for assuring environmentally friendly products

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