piezosystem jena GmbH

The systems of the MIPOS 600SG OEM series offer a nano-positioning and scanning range up to 600 µm in open loop operation, and 500 µm in closed loop. They can be assembled with objectives with a diameter of up to 40 mm.

Unique parallelogram design guarantees high parallel motion without influencing the optical axis. The precise positioning repeatability of the MIPOS 600SG OEM can be guaranteed by the use of the integrated measurement system. The design which includes integrated pre-load of the actuator offers high resonant frequency and highly parallel motion, and is available in an upside-down version for inverted microscopes.

Due to the unique features of the MIPOS 600 series, fast scanning applications can be accurately realized with the shortest settling times.

The PSH 25 serves the fast and precise positioning of optical components. Mirrors or prisms can be positioned in the mrad range at up to several hundred kilohertz.
This tip-tilt steering mirror platform is characterized by the positioning of optical components in two axes. A tilting range of up to ±20 mrad (open loop) / ±16 mrad (closed loop) is available. Another key feature is the easy exchange of different optical components.
The tilting system PSH 25 can be equipped with an integrated strain gauge positioning sensor. Positions can be controlled very exactly and a previously established tilt range can be set and repeated.
Optics and optical components in various sizes can be mounted on to this tilting system.

The piezo gripper is designed for microsystem handling applications.

The accurate and high speed motion of a piezo actuator is transformed by the levered transmission of a solid state hinge joint to a 300 µm opening of the gripper gap.

Because of the compact dimensions the piezo gripper is ideally suited for OEM applications. The grip force is dependent on the spring used.

Precise handling and manipulation of small parts in research labs or industry, are potential applications of Grippy.

The unique three-dimensional microTRITOR piezo stage, uses elements that are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 9 µm in all three axes can be realized. The resolution is in the sub-nm range.

The microTRITOR can be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions. Due to its design the microTRITOR is suitable for dynamic applications.

The PZ 250 CAP WL was developed for the precise positioning of semiconductor wafers with diameters up to 12”. In closed-loop operation the actuator offers motion in Z direction of 250 μm. Equipped with a capacitive sensor that overcomes hysteresis and drift, single steps in nanometers can be achieved. Specified positions can be held with high stability for a long periods. Due to its high stiffness, the PZ 250 CAP WL can carry loads up to 3 kg.

The PZ 250 CAP WL is well suited for applications in the semiconductor industry, solar panel production, lithography, and mask inspection.

The new NV200/D amplifier is built to deliver powerful high-resolution signals offering a wide variety of control options including ethernet and USB – C. With 400 mA of peak current, the system can provide high frequencies and fast response times, while still maintaining 16 bit resolution and less than 0.3 mV of noise.

The NV 200/D comes with an integrated closed loop control, as well as Iterative Learning Control for closed loop precision at open loop speeds.

For precise control of the NV200/D NET, the included PiSoWorks software gives the user complete control over both the actuator and the amplifier for a complete solution.