Levitronix GmbH

Bändliweg 30
Zurich,  CH-8048

Switzerland
http://www.levitronix.com
  • Booth: C1108


Levitronix® – Better Products for Better Yield!

Levitronix® develops, markets, and sells ultrapure pump systems, mixers, blowers, flow sensors and flow control systems to the Semiconductor Industry. Levitronix® products are based on magnetically levitated bearingless motor technology, which allows for contact-free, and thus, particle-free operation. With no mechanical wear, Levitronix® pumps are ideal for CMP slurry handling, metal plating processes, wet cleaning and etching, and high purity fluid transfer and delivery. Levitronix® pumps deliver continuous flow allowing for precise electronic control of flow and pressure. The Levitronix® pump systems are designed for ultrapure fluid applications where extremely low particle shedding and metal contamination are required. Tests conducted by an independent laboratory prove that particle generation from a Levitronix® pump is significantly less than that from diaphragm pumps. Comparative tests among Levitronix®, bellows and diaphragm pumps, conducted with CMP slurries, showed the Levitronix® pumps producing 200-1,000 times fewer large particles which can scratch and damage wafers.

Highest market share of liquid pumps in: • CMP slurry delivery • Single wafer cleaning • Electrochemical deposition

 Products

  • BPS-i600
    Ultrapure Pump System for Microelectronics Wet Applications...

    • The Levitronix® BPS-i600 is designed for ultrapure processing of delicate fluids in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down.
    The impeller and casing are both made from chemical-resistant high purity fluoropolymer resins. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed. The motor and pump controller are integrated into the driver housing resulting in a significantly reduced footprint.
  • Levitronix® LFS
    Ultrasonic High-Precision Flow Measurement for Microelectronics Wet Applications...

    • The LEVIFLOW® LFS inline sensor is designed for non-invasive high precision flow measurements of high purity fluids. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid. The wet material is made from PFA and resistant against harshest chemicals.
  • Levitronix® BFS
    Chemically Resistant MagLev Fans...

    • The Levitronix® Bearingless Fan System BFS is designed for demanding applications in microelectronics manufacturing. Based on active magnetic levitation, the fan impeller is suspended and driven by the magnetic field of the motor. The wide gap between impeller and stator ensures that there is no wear and therefore virtually no particle generation, making it the purest fan. As the impeller and stator are completely encapsulated, the fan is extremely resistant against aggressive media and is rated for use in explosive atmospheres.
  • Levitronix® LFSC-D PFA
    Ultrasonic Clamp-On Flow Measurement for Microelectronics Wet Applications...

    • The LEVIFLOW® LFSC-D clamp-on sensor is designed for non-invasive flow measurements of high purity fluids with PFA tubing. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid.

Categories

207 Process Equipment
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
    • 400 Components, Parts & Accessories
  • Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
  • Sensors
    • 401 Sub-systems
  • Process Monitoring systems
  • Pumps, for Fluids
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Chemical; Pure Water; Fluid Handling; Storage; Supply Systems
  • Chemical; Pure Water; Fluid Monitoring & Control Systems
  • Data Collection; Building control systems
  • Process Controls

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