LIEB SMIF-LP200 is a high reliable system for opening 200mm SMIF pods and loading wafers into a fully autometed equipment by a robot . The integrated scanner detects single, double and cross slotted wafers. The SMIF-LP200 comes with state of the art connections for easy integration.
The SMIF-LP200 can optionally be equiped with an adoptor plate for direct front equipment mounting.