Polytec GmbH

Polytec-Platz 1-7
Waldbronn,  D-76337

Germany
http://www.polytec.com
  • Booth: C1658


Experts in optical and semiconductor measurement technology

Polytec provides instruments and components for a variety of semiconductor measurement applications:

Four-Point-Probes (sophisticated fully automated systems as well as simple manual systems), CV mapping, SECS/GEM hardware and software, optical and photothermal layer thickness measurement, InGaAs cameras, UV curing systems, fiberoptic sensing (temperature, strain, vibration). Laser-Doppler-Vibrometry, MEMS Vibration and Motion Analysis, Wafer-level MEMS Test Solutions, Surface Profilometry and Topography Measurement.


 Products

  • Enovasense Layer thickness measurement system
    Contactless transparent and semi-transparent layer thickness measurement under industrial conditions...

  • The laser-based coating thickness measurement system is working completely contact-free. The opaque, semi-transparent or transparent coating is measured from a working distance of 5 to 20 cm using laser and infrared sensors. It is designed for industrial environmental conditions, i.e. also on conveyor belts, at high temperatures and in a wet or brittle condition.

    The measurement is non-destructive and tactile unaffected. The excitation laser generates only slight heating, so that neither the object nor the coating are affected.

    The measurement takes less than a second. It is based on a physical model that allows the system to be pre-calibrated according to the application. The calibration is both faster and easier to implement than with conventional methods. For some applications, calibration can even be omitted entirely.

    The small dimensions of the measuring head (75 x 32 x 41 mm with a weight of 150 g) enable measurements in places that were previously absolutely inaccessible.

  • eInnoSys SECS/GEM Software
    The extensive EIGEM software family enables customized software solutions for OEMs and semiconductor factories around the SECS/GEM protocol....

  • The extensive EIGEM software family enables customized software solutions for OEMs and semiconductor factories around the SECS/GEM protocol.

    The platform and technology-independent protocol, which is widespread in the semiconductor industry, is used for communication between the semiconductor device and the fab host. It defines the data transfer, states and scenarios for controlling and monitoring manufacturing plants through factory host applications.

    In addition to the plug-n-play software libraries, eInnoSys offers the probably unique EIGEM box, with which systems can be enabled for SECS/GEM without software installation on the controller PC.


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