PVA SPA Software Entwicklungs GmbH

Seifartshofstrasse 12 - 14
Coburg,  D-96450

Germany
https://www.pvatepla-spa.com/
  • Booth: B1764


We are looking forward seeing you at our booth B1764!

PVA TePla — is not just about high-tech products, innovative systems and materials, dynamic processes, experts, and companies. It means fully developed structures, an open corporate culture, and responsible actions.

By linking with innovative strength, we open up clear competitive advantages for our customers in existing markets and in new application fields—from the semiconductor industry to vacuum technology all the way to material analysis.

PVA SPA Software Entwicklungs GmbH is a medium-sized company based in Coburg, Germany, which has focused on the semiconductor market since its foundation in 1989. It supplies customers worldwide with specific software programs for industrial automation processes in semiconductor manufacturing. In addition, SPA also offers complete machine solutions with optical components for manual to fully automated quality assurance of semiconductor products. An integrated Industry 4.0 connection via SECS/GEM300 or MES coupling are available for all their machines.

 Products

  • UL20x microscope
    Visual microscope for semi-automatic inspection of up to 200mm wafer, loaded automatically by the UL200 wafer loader from cassettes onto a motorized xy table....

    • Optical inspection

    Our base systems are designed to allow a flexible integration of various inspection capabilities. The possibilities range from manually operated inspection workflows up to full automation with image analysis with specific algorithmic inspection tasks. For this purpose we provide compact handling solutions for loading wafers or frames onto various inspection systems.

    All details here...

  • UL20x SMIF microscope with FFU
    Digital microscope with KLArf compatibility and high cleanroom standard using 200mm SMIF wafer cassette and FFU mini environment....

    • Optical inspection

    Our base systems are designed to allow a flexible integration of various inspection capabilities. The possibilities range from manually operated inspection workflows up to full automation with image analysis with specific algorithmic inspection tasks. For this purpose we provide compact handling solutions for loading wafers or frames onto various inspection systems.

    All details here ...

  • SPA AVI machine
    Automatic visual wafer inspection machine for up to 300mm wafer using Golden chip variation, pad inspection and CD measurements....

    • Optical inspection

    Our base systems are designed to allow a flexible integration of various inspection capabilities. The possibilities range from manually operated inspection workflows up to full automation with image analysis with specific algorithmic inspection tasks. For this purpose we provide compact handling solutions for loading wafers or frames onto various inspection systems.

    All details here ...

Categories

203 Inspection & Measurement Products
  • Defect; Particle; Bump; Contamination Detection, Review or Inspection
  • Die Inspection; Die Shear
  • Flat; Notch Finding System
  • Line Width; Critical Dimension (CD) Measurement
  • Microscopes: Optical Microscopes
  • Overlay Measurement
    • 206 PV Equipment
  • Inspection and Metrology
  • Integration and Automation
  • Wafers
    • 600 Communication Software
  • Equipment Interface; Communication Protocols
    • 602 Manufacturing Software
  • Factory Automation; Cell Controller Software
  • Production Control software
  • Yield Mgmt; Process Control Software
    • 701 Manufacturing Services or Consulting
  • Software Programming; Software Development

    • Send Email

    Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".

    Loading ...

    :
    :


    Legend
    Available Timeslot
    Scheduled Appointment
    Personal Appointments
    Appointment Request
    Blocked Timeslot
    Restricted Timeslot
    Cancelled
    Declined