<PRODUCT FEATURES>
Stable Power Control
SMPS Mode DC Power Supply Design
Programmable Power Ramping
Air / Water Cooling
User Interface for Easy Operation
RS-232 / RS-485 / Analog Interface
<APPLICATION>
Descum Process
PECVD system
Dry Etch system
Sputtering system
OLED system
Atmospheric plasma system
<PRODUCT LINE-UP>
Power
|
100kHz
|
400kHz
|
750kHz
|
2MHz
|
3.2MHz
|
4MHz
|
13.56
MHz
|
27.12
MHz
|
40
MHz
|
600W
|
●
|
●
|
●
|
■
|
■
|
●
|
■
|
★
|
★
|
1.5kW
|
■
|
■
|
■
|
■
|
■
|
●
|
■
|
★
|
★
|
3kW
|
●
|
●
|
●
|
■
|
■
|
●
|
■
|
★
|
★
|
5kW
|
●
|
▲
|
●
|
●
|
●
|
●
|
■
|
|
|
10kW
|
●
|
▲
|
●
|
●
|
●
|
●
|
●
|
|
|
15kW
|
|
▲
|
|
|
|
|
|
|
|
■ : Released ● : Product Available ▲ : Splitter Matcher ★:Developing