Fastmicro BV

The Fastmicro Sample Scanner measures surface particle contamination levels indirectly using samplers. These samplers benefit the user by enabling them to take particle contamination samples at any time on various products and assemblies.

Indirect measurements with samplers holder

The Sample Scanner even allows robust measurements in places that are difficult to reach, and on relatively rough surfaces. The samplers (as certified by partner) collect particles from the surface, without leaving measurable residue behind.

The Sample Scanner measures the samples within seconds, which enables our customers to achieve an operator's workflow of less than a minute.

The samplers can be transported in a clean sampler holder, re-measured and further analyzed.

A particle fallout upgrade option is available for measuring particle deposition with the 1" wafer holder.

Consistent measurements in process

1. Fast: imaging takes seconds

2. Quantified: traceable digital output

3. Easy to operate: operator independent

a. Qualification in production by operators

b. Analysis, for advanced users in R&D

c. Monitoring, continuous and SPC

4. Accurate: high-resolution measurement (quantity, position, size)

5. Consistent: objective measurements, time after time

6. High throughput: processing within a minute

For more information about the Fastmicro Sample Scanner, please contact our sales department or come visit us at the booth.

Product Scanner for direct measurements on product surface

The Fastmicro Product Scanner has been developed to measure surface particle contamination levels directly on a product’s surfaces in any industry. The primary applications are in semicon (pellicles, reticles, wafers) and the display market. The scanner has an unlimited scanning area due to its modular and scalable design.

The system can be customized, depending on the shape and position of the surface that needs to be tested. The scanner module is also available as a white label solution for system integrators.

Modular: fit for each production process

The modular Fastmicro Product Scanner can be customized to suit each production qualification process or to fit into a production line. This can include clean and automated handling: package openers for inspection and cleaning, filling stations, robot arms, an inspection spot and a port for cleaning.

The Fastmicro module allows for a scaled inspection surface to suit customer needs, without introducing extra imaging time and using limited floor space.

Consistent measurements in process 

1. Fast: imaging in seconds on large surfaces

2. Quantified: fit for qualification and monitoring in production, as well as in an R&D environment

3. Easy to operate: operator independent, even automated and clean handling. Your product stays clean: no contact, no contamination

4. Accurate: high-resolution measurement (quantity, position, size)

5. Consistent: objective measurements, time after time

6. High throughput: processing within a minute

Fastmicro Particle Fallout Scanner for particle fallout measurements

The Fastmicro Particle Fallout Scanner has been developed to measure the particle deposition rate in any industry. It can be used in both vacuum as well as ambient environments, andis typically used in clean environments. The scanner module is also available as a white label solutionfor system integrators.

Continuously measure where and when it matters

The Fastmicro Fallout Scanner offers particle deposition rate monitoring with intervals in seconds. The particle deposition rate can be accurately measured starting at particles of just 0.5µm. Combined with the easy to use software, we help our customers to view cleanliness measurements on surfaces instead of airborne-only. Not all particles remain airborne, as they could deposit on critical surfaces, impacting technical cleanliness. With the Particle Fallout Scanner, the actual deposition rate becomes clear and can be used for further cleanliness improvement.

Consistent measurements in process

1. Fast: continuous monitoring in seconds

2. Quantified: fit for qualification and monitoring in production, as well as in an R&D environment

3. Easy to operate: operator independent

4. Accurate: high-resolution measurement (quantity, timestamp, position, size)

5. Consistent: objective measurements, time after time

6. High throughput: we enable high throughput