Fabmatics GmbH

Our HERO®FAB series combines an established, clean and safe 6-axis robot system with a free-moving vehicle.
It is designed to fully automatically load and unload process machines and to transport wafer carriers between load ports, stockers and racks in the clean room.
The HERO®FAB runs completely free without rail or cable connection. This makes it the ideal and flexible alternative to permanently installed transport systems for automating even hard-to-reach areas of a semiconductor factory. The transport jobs are coordinated by the Fabmatics fleet manager (HSFM).

Key Features:

• Fully free-moving platform and ultimate maneuverability with omni-directional drive technology
• Vibration-free handling with powerful, for 24/7 use proven industrial 6-axis robot
• Charging on-the-fly during handling enables 24/7 operation
• Vertical & horizontal laser scanners for a safe collaboration of human and machine
• Autogripping (camera-based gripping)
• Inductive charging
• High material safety due to redundant sensors, active lock in an emergency case and occupancy check of load ports (special: earthquake protection)
• Versions for SMIF pods and open cassettes available
• HSFM fleet manager for multi robot management

Learn more

This innovative system is the ideal solution for the space-saving storage of material carriers e.g. open wafer cassettes and HA-200 boxes where floor space is limited and very valuable. Without using costly clean room floor space, the FlatStocker hangs from the ceiling and can be designed to handle variety of cassette types. FlatStocker provides carrier ID information, in real time, to the customer’s MCS (Material Control System) using RFID and barcode technology.

Connected to a transport system and vertical lifts, the system enables fast storage and access to batches.

The simple design is based on proven industrial components. This enables great flexibility in laying out the most effective configurations to meet the customer’s storage requirements and available space.

Features:

• Storage of product carriers, e.g. open wafer cassettes and HA-200 boxes below the cleanroom ceiling
• RFID and barcode technology enables location tracing of lots in real time
• Controller software compliant SECS GEM / SEMI E88 / SEMI E84 Interface for carrier transfer to other systems
• Flexible design adjustment according to customer needs
• Up to ISO 3 / US FED class 1
• Operating speed 1.5 m/s in ISO 4 clean rooms

Learn more

The special feature: Within the CubeStocker, a separate ISO 3 clean room atmosphere is created in order to temporarily store the wafers absolutely cleanly before the next processing step. In this way, we provide a buffer for the production process without compromising the quality of the yield. Due to its own supply of clean air, the CubeStocker can also be placed in the grey room (ISO 6) to save valuable clean room space for important process tools. The CubeStocker is particularly suitable for semiconductor fabs that do not have storage facilities under the ceiling.

The CubeStocker is assembled from the "inside". This means that the system can also be installed in corners and niches without any problems. It is also possible to arrange several stockers in a row.

Features:

• Up to 193 storage places
• Complies with clean room class ISO 3
• Input and output via interfaces to the ceiling transport system (e.g. conveyor)
• System-wide carrier identification via RFID technology
• Integration into existing automation system via SEMI SECS/GEM interface
• Reduced duration of commissioning or maintenance through automatic teaching of robot positions (AutoTeaching)